JPH0130125B2 - - Google Patents

Info

Publication number
JPH0130125B2
JPH0130125B2 JP53014851A JP1485178A JPH0130125B2 JP H0130125 B2 JPH0130125 B2 JP H0130125B2 JP 53014851 A JP53014851 A JP 53014851A JP 1485178 A JP1485178 A JP 1485178A JP H0130125 B2 JPH0130125 B2 JP H0130125B2
Authority
JP
Japan
Prior art keywords
optical system
mirror
convex
meniscus
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53014851A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53100230A (en
Inventor
Ofunaa Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Publication of JPS53100230A publication Critical patent/JPS53100230A/ja
Publication of JPH0130125B2 publication Critical patent/JPH0130125B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0836—Catadioptric systems using more than three curved mirrors
    • G02B17/0844—Catadioptric systems using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Stereoscopic And Panoramic Photography (AREA)
JP1485178A 1977-02-11 1978-02-10 Ring zone fielddoffview optical system Granted JPS53100230A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US76790677A 1977-02-11 1977-02-11

Publications (2)

Publication Number Publication Date
JPS53100230A JPS53100230A (en) 1978-09-01
JPH0130125B2 true JPH0130125B2 (zh) 1989-06-16

Family

ID=25080934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1485178A Granted JPS53100230A (en) 1977-02-11 1978-02-10 Ring zone fielddoffview optical system

Country Status (7)

Country Link
JP (1) JPS53100230A (zh)
CA (1) CA1103498A (zh)
CH (1) CH625055A5 (zh)
DE (1) DE2801882A1 (zh)
FR (1) FR2380563A1 (zh)
GB (2) GB1605161A (zh)
IT (1) IT1101789B (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4331390A (en) * 1979-10-09 1982-05-25 The Perkin-Elmer Corporation Monocentric optical systems
JPS5890610A (ja) * 1981-11-24 1983-05-30 Matsushita Electric Ind Co Ltd カタデイオプトリツク光学系
US4469414A (en) * 1982-06-01 1984-09-04 The Perkin-Elmer Corporation Restrictive off-axis field optical system
JPS59144127A (ja) * 1983-02-07 1984-08-18 Canon Inc 像調整された光学装置
JPS6093410A (ja) * 1983-10-27 1985-05-25 Canon Inc 反射光学系
JPS6147916A (ja) * 1984-08-14 1986-03-08 Canon Inc 反射光学系
US4747678A (en) * 1986-12-17 1988-05-31 The Perkin-Elmer Corporation Optical relay system with magnification
JP2565149B2 (ja) * 1995-04-05 1996-12-18 キヤノン株式会社 回路の製造方法及び露光装置
JP5196869B2 (ja) * 2007-05-15 2013-05-15 キヤノン株式会社 投影光学系、露光装置及びデバイス製造方法
CN102981255B (zh) * 2011-09-07 2016-04-20 上海微电子装备有限公司 一种大视场投影物镜
JP2020052342A (ja) * 2018-09-28 2020-04-02 キヤノン株式会社 光学機器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2344756A (en) * 1941-01-06 1944-03-21 Taylor Taylor & Hobson Ltd Optical objective
US2682197A (en) * 1951-08-13 1954-06-29 American Optical Corp Folded reflecting optical system of the schmidt type
SU126911A1 (ru) * 1959-03-30 1959-11-30 Н.Н. Петрушов Зеркально-линзовый объектив
US3821763A (en) * 1971-06-21 1974-06-28 Perkin Elmer Corp Annular field optical imaging system
US3748015A (en) * 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
US3951546A (en) * 1974-09-26 1976-04-20 The Perkin-Elmer Corporation Three-fold mirror assembly for a scanning projection system

Also Published As

Publication number Publication date
IT1101789B (it) 1985-10-07
CA1103498A (en) 1981-06-23
FR2380563B1 (zh) 1984-01-20
GB1605160A (en) 1982-08-11
DE2801882C2 (zh) 1988-02-04
GB1605161A (en) 1982-08-11
DE2801882A1 (de) 1978-08-17
CH625055A5 (en) 1981-08-31
JPS53100230A (en) 1978-09-01
FR2380563A1 (fr) 1978-09-08
IT7848011A0 (it) 1978-02-10

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