JPH01290220A - 化合物半導体層の成長方法 - Google Patents

化合物半導体層の成長方法

Info

Publication number
JPH01290220A
JPH01290220A JP63119280A JP11928088A JPH01290220A JP H01290220 A JPH01290220 A JP H01290220A JP 63119280 A JP63119280 A JP 63119280A JP 11928088 A JP11928088 A JP 11928088A JP H01290220 A JPH01290220 A JP H01290220A
Authority
JP
Japan
Prior art keywords
temperature
layer
growth
buffer layer
compound semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63119280A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573333B2 (enExample
Inventor
Masahiro Akiyama
秋山　正博
Sachiko Onozawa
小野沢　幸子
Takashi Ueda
孝 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP63119280A priority Critical patent/JPH01290220A/ja
Publication of JPH01290220A publication Critical patent/JPH01290220A/ja
Publication of JPH0573333B2 publication Critical patent/JPH0573333B2/ja
Granted legal-status Critical Current

Links

JP63119280A 1988-05-18 1988-05-18 化合物半導体層の成長方法 Granted JPH01290220A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63119280A JPH01290220A (ja) 1988-05-18 1988-05-18 化合物半導体層の成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63119280A JPH01290220A (ja) 1988-05-18 1988-05-18 化合物半導体層の成長方法

Publications (2)

Publication Number Publication Date
JPH01290220A true JPH01290220A (ja) 1989-11-22
JPH0573333B2 JPH0573333B2 (enExample) 1993-10-14

Family

ID=14757475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63119280A Granted JPH01290220A (ja) 1988-05-18 1988-05-18 化合物半導体層の成長方法

Country Status (1)

Country Link
JP (1) JPH01290220A (enExample)

Also Published As

Publication number Publication date
JPH0573333B2 (enExample) 1993-10-14

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