JPH0128686Y2 - - Google Patents

Info

Publication number
JPH0128686Y2
JPH0128686Y2 JP13917083U JP13917083U JPH0128686Y2 JP H0128686 Y2 JPH0128686 Y2 JP H0128686Y2 JP 13917083 U JP13917083 U JP 13917083U JP 13917083 U JP13917083 U JP 13917083U JP H0128686 Y2 JPH0128686 Y2 JP H0128686Y2
Authority
JP
Japan
Prior art keywords
vacuum
attached
sample
bellows
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13917083U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6048233U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13917083U priority Critical patent/JPS6048233U/ja
Publication of JPS6048233U publication Critical patent/JPS6048233U/ja
Application granted granted Critical
Publication of JPH0128686Y2 publication Critical patent/JPH0128686Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
JP13917083U 1983-09-09 1983-09-09 真空容器用移動台 Granted JPS6048233U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13917083U JPS6048233U (ja) 1983-09-09 1983-09-09 真空容器用移動台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13917083U JPS6048233U (ja) 1983-09-09 1983-09-09 真空容器用移動台

Publications (2)

Publication Number Publication Date
JPS6048233U JPS6048233U (ja) 1985-04-04
JPH0128686Y2 true JPH0128686Y2 (enrdf_load_stackoverflow) 1989-08-31

Family

ID=30312021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13917083U Granted JPS6048233U (ja) 1983-09-09 1983-09-09 真空容器用移動台

Country Status (1)

Country Link
JP (1) JPS6048233U (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004160882A (ja) * 2002-11-14 2004-06-10 Takara Seisakusho:Kk 樹脂封止装置
JP4879833B2 (ja) * 2007-07-30 2012-02-22 株式会社ダイヘン 搬送装置
JP5649211B2 (ja) * 2010-10-19 2015-01-07 独立行政法人産業技術総合研究所 成膜装置
JP7228612B2 (ja) 2020-03-27 2023-02-24 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム

Also Published As

Publication number Publication date
JPS6048233U (ja) 1985-04-04

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