JPS6048233U - 真空容器用移動台 - Google Patents

真空容器用移動台

Info

Publication number
JPS6048233U
JPS6048233U JP13917083U JP13917083U JPS6048233U JP S6048233 U JPS6048233 U JP S6048233U JP 13917083 U JP13917083 U JP 13917083U JP 13917083 U JP13917083 U JP 13917083U JP S6048233 U JPS6048233 U JP S6048233U
Authority
JP
Japan
Prior art keywords
vacuum container
stage
moving platform
vacuum containers
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13917083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128686Y2 (enrdf_load_stackoverflow
Inventor
博司 山口
朗 嶋瀬
宮内　建興
勝久 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13917083U priority Critical patent/JPS6048233U/ja
Publication of JPS6048233U publication Critical patent/JPS6048233U/ja
Application granted granted Critical
Publication of JPH0128686Y2 publication Critical patent/JPH0128686Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
JP13917083U 1983-09-09 1983-09-09 真空容器用移動台 Granted JPS6048233U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13917083U JPS6048233U (ja) 1983-09-09 1983-09-09 真空容器用移動台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13917083U JPS6048233U (ja) 1983-09-09 1983-09-09 真空容器用移動台

Publications (2)

Publication Number Publication Date
JPS6048233U true JPS6048233U (ja) 1985-04-04
JPH0128686Y2 JPH0128686Y2 (enrdf_load_stackoverflow) 1989-08-31

Family

ID=30312021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13917083U Granted JPS6048233U (ja) 1983-09-09 1983-09-09 真空容器用移動台

Country Status (1)

Country Link
JP (1) JPS6048233U (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004043673A1 (ja) * 2002-11-14 2004-05-27 Takara Tool & Die Co., Ltd. 樹脂封止装置
JP2009033018A (ja) * 2007-07-30 2009-02-12 Daihen Corp 搬送装置
JP2012087357A (ja) * 2010-10-19 2012-05-10 National Institute Of Advanced Industrial Science & Technology 成膜装置
JP2023025706A (ja) * 2020-03-27 2023-02-22 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004043673A1 (ja) * 2002-11-14 2004-05-27 Takara Tool & Die Co., Ltd. 樹脂封止装置
JP2009033018A (ja) * 2007-07-30 2009-02-12 Daihen Corp 搬送装置
JP2012087357A (ja) * 2010-10-19 2012-05-10 National Institute Of Advanced Industrial Science & Technology 成膜装置
JP2023025706A (ja) * 2020-03-27 2023-02-22 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム
US11935762B2 (en) 2020-03-27 2024-03-19 Kokusai Electric Corporation Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

Also Published As

Publication number Publication date
JPH0128686Y2 (enrdf_load_stackoverflow) 1989-08-31

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