JPH01240694A - 狭隙空間部分に対するメッキ方法 - Google Patents
狭隙空間部分に対するメッキ方法Info
- Publication number
- JPH01240694A JPH01240694A JP6509888A JP6509888A JPH01240694A JP H01240694 A JPH01240694 A JP H01240694A JP 6509888 A JP6509888 A JP 6509888A JP 6509888 A JP6509888 A JP 6509888A JP H01240694 A JPH01240694 A JP H01240694A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- plating
- plated
- water
- pretreatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 53
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 238000004140 cleaning Methods 0.000 claims abstract description 9
- 238000002203 pretreatment Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 abstract 6
- 230000002950 deficient Effects 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemically Coating (AREA)
- Electroplating Methods And Accessories (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6509888A JPH01240694A (ja) | 1988-03-18 | 1988-03-18 | 狭隙空間部分に対するメッキ方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6509888A JPH01240694A (ja) | 1988-03-18 | 1988-03-18 | 狭隙空間部分に対するメッキ方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01240694A true JPH01240694A (ja) | 1989-09-26 |
| JPH0416556B2 JPH0416556B2 (enExample) | 1992-03-24 |
Family
ID=13277099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6509888A Granted JPH01240694A (ja) | 1988-03-18 | 1988-03-18 | 狭隙空間部分に対するメッキ方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01240694A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6544585B1 (en) | 1997-09-02 | 2003-04-08 | Ebara Corporation | Method and apparatus for plating a substrate |
| JP2008075103A (ja) * | 2006-09-19 | 2008-04-03 | Sumitomo Electric Ind Ltd | 多孔質樹脂材料の形成方法 |
| JP2013001996A (ja) * | 2011-06-22 | 2013-01-07 | Nippon Aleph Corp | 袋状微細管のメッキ膜形成方法及びメッキ膜形成システム |
| JP2018104799A (ja) * | 2016-12-28 | 2018-07-05 | 株式会社荏原製作所 | 基板を処理するための方法および装置 |
| JP2021513608A (ja) * | 2018-02-14 | 2021-05-27 | スリーディー プラス | 液相析出法によって電子モジュールの穴を金属化するためのプロセス |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684498A (en) * | 1979-12-11 | 1981-07-09 | Seiko Epson Corp | Plating method of cast product |
| JPS5684497A (en) * | 1979-12-11 | 1981-07-09 | Seiko Epson Corp | Plating method of cast product |
| JPS5684499A (en) * | 1979-12-11 | 1981-07-09 | Seiko Epson Corp | Plating method of cast product |
| JPS6125799A (ja) * | 1984-07-12 | 1986-02-04 | 末崎 康永 | 料理用切断機 |
-
1988
- 1988-03-18 JP JP6509888A patent/JPH01240694A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5684498A (en) * | 1979-12-11 | 1981-07-09 | Seiko Epson Corp | Plating method of cast product |
| JPS5684497A (en) * | 1979-12-11 | 1981-07-09 | Seiko Epson Corp | Plating method of cast product |
| JPS5684499A (en) * | 1979-12-11 | 1981-07-09 | Seiko Epson Corp | Plating method of cast product |
| JPS6125799A (ja) * | 1984-07-12 | 1986-02-04 | 末崎 康永 | 料理用切断機 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6544585B1 (en) | 1997-09-02 | 2003-04-08 | Ebara Corporation | Method and apparatus for plating a substrate |
| JP2008075103A (ja) * | 2006-09-19 | 2008-04-03 | Sumitomo Electric Ind Ltd | 多孔質樹脂材料の形成方法 |
| JP2013001996A (ja) * | 2011-06-22 | 2013-01-07 | Nippon Aleph Corp | 袋状微細管のメッキ膜形成方法及びメッキ膜形成システム |
| JP2018104799A (ja) * | 2016-12-28 | 2018-07-05 | 株式会社荏原製作所 | 基板を処理するための方法および装置 |
| US11371155B2 (en) | 2016-12-28 | 2022-06-28 | Ebara Corporation | Method and apparatus for processing a substrate |
| JP2021513608A (ja) * | 2018-02-14 | 2021-05-27 | スリーディー プラス | 液相析出法によって電子モジュールの穴を金属化するためのプロセス |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416556B2 (enExample) | 1992-03-24 |
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