JPH0122154B2 - - Google Patents
Info
- Publication number
- JPH0122154B2 JPH0122154B2 JP55021950A JP2195080A JPH0122154B2 JP H0122154 B2 JPH0122154 B2 JP H0122154B2 JP 55021950 A JP55021950 A JP 55021950A JP 2195080 A JP2195080 A JP 2195080A JP H0122154 B2 JPH0122154 B2 JP H0122154B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- protective layer
- silicon
- thin film
- thermal head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Electronic Switches (AREA)
- Chemical Vapour Deposition (AREA)
- Details Of Resistors (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2195080A JPS56120512A (en) | 1980-02-23 | 1980-02-23 | Thin film protecting layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2195080A JPS56120512A (en) | 1980-02-23 | 1980-02-23 | Thin film protecting layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56120512A JPS56120512A (en) | 1981-09-21 |
| JPH0122154B2 true JPH0122154B2 (enrdf_load_stackoverflow) | 1989-04-25 |
Family
ID=12069337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2195080A Granted JPS56120512A (en) | 1980-02-23 | 1980-02-23 | Thin film protecting layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56120512A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191901A (ja) * | 1984-10-12 | 1986-05-10 | ティーディーケイ株式会社 | 薄膜保護層 |
| KR20100068281A (ko) * | 2007-10-16 | 2010-06-22 | 스미토모 베이클리트 컴퍼니 리미티드 | 반도체 소자 탑재 기판 |
-
1980
- 1980-02-23 JP JP2195080A patent/JPS56120512A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56120512A (en) | 1981-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4343986A (en) | Thermal printhead | |
| JPH0122154B2 (enrdf_load_stackoverflow) | ||
| JP4628685B2 (ja) | 光情報記録媒体用スパッタリングターゲット及び光情報記録媒体 | |
| JPS6191901A (ja) | 薄膜保護層 | |
| JPH0551528B2 (enrdf_load_stackoverflow) | ||
| JP4925537B2 (ja) | サーマルヘッド | |
| JP2870692B2 (ja) | 薄膜型サーマルヘッド | |
| JPH04370901A (ja) | 電気抵抗材料 | |
| JPH0712692B2 (ja) | 薄膜型サ−マルヘツド | |
| JPS6144401A (ja) | 耐摩耗層および電子部品 | |
| JPS6196704A (ja) | 抵抗体の製造方法 | |
| JPH0640522B2 (ja) | 薄膜抵抗体 | |
| JPH0712691B2 (ja) | 薄膜型サ−マルヘツド | |
| JPH0641212B2 (ja) | 耐摩耗性保護膜 | |
| EP0471080B1 (en) | Sputtering target, film resistor formed with the use thereof, and thermal printer head and associated methods of production | |
| JP4925535B2 (ja) | サーマルヘッド | |
| JPS6277476A (ja) | 保護膜及びその製造法 | |
| JPS6249193B2 (enrdf_load_stackoverflow) | ||
| JP4925536B2 (ja) | サーマルヘッド | |
| JPS62202753A (ja) | 薄膜型サ−マルヘツド | |
| JPH0712690B2 (ja) | 薄膜型サ−マルヘツド | |
| JPH0144510B2 (enrdf_load_stackoverflow) | ||
| JPS62201265A (ja) | 薄膜型サ−マルヘツド | |
| JPS6189601A (ja) | 保護膜 | |
| JPS6295801A (ja) | 薄膜抵抗体の製造方法 |