JPH0121260B2 - - Google Patents
Info
- Publication number
- JPH0121260B2 JPH0121260B2 JP57000816A JP81682A JPH0121260B2 JP H0121260 B2 JPH0121260 B2 JP H0121260B2 JP 57000816 A JP57000816 A JP 57000816A JP 81682 A JP81682 A JP 81682A JP H0121260 B2 JPH0121260 B2 JP H0121260B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- temperature plasma
- low
- sheet
- sheet winding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004804 winding Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 24
- 230000006837 decompression Effects 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 14
- 239000004744 fabric Substances 0.000 description 9
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 238000009832 plasma treatment Methods 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000009991 scouring Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009990 desizing Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
- D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
- D06M10/025—Corona discharge or low temperature plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Textile Engineering (AREA)
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP81682A JPS58120860A (ja) | 1982-01-06 | 1982-01-06 | シ−ト状物質の低温プラズマ処理装置 |
DE19833300097 DE3300097A1 (de) | 1982-01-06 | 1983-01-04 | Anlage zum behandeln von platten- bzw. bahnaehnlichen stoffen mit einem niedertemperatur-plasma |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP81682A JPS58120860A (ja) | 1982-01-06 | 1982-01-06 | シ−ト状物質の低温プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58120860A JPS58120860A (ja) | 1983-07-18 |
JPH0121260B2 true JPH0121260B2 (zh) | 1989-04-20 |
Family
ID=11484193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP81682A Granted JPS58120860A (ja) | 1982-01-06 | 1982-01-06 | シ−ト状物質の低温プラズマ処理装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS58120860A (zh) |
DE (1) | DE3300097A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3312307A1 (de) * | 1983-04-06 | 1984-10-11 | Sando Iron Works Co., Ltd., Wakayama, Wakayama | Vorrichtung zum behandeln eines textilguts |
JPS60228673A (ja) * | 1984-04-25 | 1985-11-13 | Hitachi Ltd | プラズマ処理装置用制御装置 |
DE4313284A1 (de) * | 1993-04-23 | 1994-10-27 | Leybold Ag | Spaltschleuse für das Ein- oder Ausbringen von Substraten von der einen in eine benachbarte Behandlungskammer |
ES2279517T3 (es) | 1995-10-27 | 2007-08-16 | APPLIED MATERIALS GMBH & CO. KG | Dispositivo para recubrir un sustrato. |
DE19540053A1 (de) * | 1995-10-27 | 1997-04-30 | Leybold Ag | Vorrichtung zum Beschichten eines Substrats, insbesondere mit elektrisch nichtleitenden Schichten |
DE19540255A1 (de) * | 1995-10-28 | 1997-04-30 | Leybold Ag | Vorrichtung zum Beschichten eines Substrats |
JP2010228180A (ja) * | 2009-03-26 | 2010-10-14 | Ube Ind Ltd | 巻き替えポリイミドフィルムロール及びその製造方法 |
FR2975308B1 (fr) * | 2011-05-16 | 2015-06-26 | Valeo Systemes Dessuyage | Dispositif d'etancheite pour le traitement sous vide d'une surface d'un objet |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5590533A (en) * | 1978-12-28 | 1980-07-09 | Toray Ind Inc | Low temperature plasma treatment of substrate |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53121469A (en) * | 1977-03-31 | 1978-10-23 | Toshiba Corp | Gas etching unit |
JPS5583735U (zh) * | 1978-12-06 | 1980-06-09 | ||
JPS5718737A (en) * | 1980-06-21 | 1982-01-30 | Shin Etsu Chem Co Ltd | Apparatus for continuous plasma treatment |
-
1982
- 1982-01-06 JP JP81682A patent/JPS58120860A/ja active Granted
-
1983
- 1983-01-04 DE DE19833300097 patent/DE3300097A1/de not_active Ceased
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5590533A (en) * | 1978-12-28 | 1980-07-09 | Toray Ind Inc | Low temperature plasma treatment of substrate |
Also Published As
Publication number | Publication date |
---|---|
JPS58120860A (ja) | 1983-07-18 |
DE3300097A1 (de) | 1983-08-04 |
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