JPH0120979Y2 - - Google Patents
Info
- Publication number
- JPH0120979Y2 JPH0120979Y2 JP10906383U JP10906383U JPH0120979Y2 JP H0120979 Y2 JPH0120979 Y2 JP H0120979Y2 JP 10906383 U JP10906383 U JP 10906383U JP 10906383 U JP10906383 U JP 10906383U JP H0120979 Y2 JPH0120979 Y2 JP H0120979Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- tube
- heating
- gas
- refrigerant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 29
- 239000003507 refrigerant Substances 0.000 claims description 28
- 239000007788 liquid Substances 0.000 claims description 14
- 239000007789 gas Substances 0.000 description 24
- 239000012535 impurity Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- JAZNSOPOXXXZQO-UHFFFAOYSA-N [N].CCO Chemical compound [N].CCO JAZNSOPOXXXZQO-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- OEERIBPGRSLGEK-UHFFFAOYSA-N carbon dioxide;methanol Chemical compound OC.O=C=O OEERIBPGRSLGEK-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10906383U JPS6017229U (ja) | 1983-07-15 | 1983-07-15 | ガス中の微量成分の濃縮装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10906383U JPS6017229U (ja) | 1983-07-15 | 1983-07-15 | ガス中の微量成分の濃縮装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6017229U JPS6017229U (ja) | 1985-02-05 |
| JPH0120979Y2 true JPH0120979Y2 (enExample) | 1989-06-23 |
Family
ID=30254206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10906383U Granted JPS6017229U (ja) | 1983-07-15 | 1983-07-15 | ガス中の微量成分の濃縮装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6017229U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992021966A1 (fr) * | 1991-05-30 | 1992-12-10 | Tadahiro Ohmi | Procede et dispositif de mesure de quantites d'impuretes dans un gaz special |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4653357B2 (ja) * | 2001-08-28 | 2011-03-16 | 大陽日酸株式会社 | 金属カルボニル化合物の分析方法及び装置 |
| EP4339596B1 (en) * | 2022-07-26 | 2026-02-04 | Technical Institute of Physics and Chemistry, Chinese Academy of Sciences | Method and apparatus for measuring trace and ultra-trace oil content |
-
1983
- 1983-07-15 JP JP10906383U patent/JPS6017229U/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992021966A1 (fr) * | 1991-05-30 | 1992-12-10 | Tadahiro Ohmi | Procede et dispositif de mesure de quantites d'impuretes dans un gaz special |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6017229U (ja) | 1985-02-05 |
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