JPH01180675U - - Google Patents

Info

Publication number
JPH01180675U
JPH01180675U JP7241388U JP7241388U JPH01180675U JP H01180675 U JPH01180675 U JP H01180675U JP 7241388 U JP7241388 U JP 7241388U JP 7241388 U JP7241388 U JP 7241388U JP H01180675 U JPH01180675 U JP H01180675U
Authority
JP
Japan
Prior art keywords
wafer
testing
chips
cutting
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7241388U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7241388U priority Critical patent/JPH01180675U/ja
Publication of JPH01180675U publication Critical patent/JPH01180675U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例によるＩＣウエハ
のテスト装置のテスト状態を示す側面図、第２図
は従来のＩＣウエハのテスト装置のテスト状態を
示す側面図である。 図において、１はプローブカード、２は測定用
針、３はＩＣチツプ、４はパツド、５はセラミツ
ク系基板、６は接着剤を示す。なお、図中、同一
符号は同一、又は相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ＩＣウエハをチツプ単位に切断した後にウエハ
    テストすることを特徴とするＩＣウエハのテスト
    装置。
JP7241388U 1988-05-31 1988-05-31 Pending JPH01180675U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7241388U JPH01180675U (ja) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7241388U JPH01180675U (ja) 1988-05-31 1988-05-31

Publications (1)

Publication Number Publication Date
JPH01180675U true JPH01180675U (ja) 1989-12-26

Family

ID=31297580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7241388U Pending JPH01180675U (ja) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH01180675U (ja)

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