JPH01177278U - - Google Patents
Info
- Publication number
- JPH01177278U JPH01177278U JP7130288U JP7130288U JPH01177278U JP H01177278 U JPH01177278 U JP H01177278U JP 7130288 U JP7130288 U JP 7130288U JP 7130288 U JP7130288 U JP 7130288U JP H01177278 U JPH01177278 U JP H01177278U
- Authority
- JP
- Japan
- Prior art keywords
- growth chamber
- growth
- epitaxial growth
- inner tube
- flow direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来例を示す断面図である。 １…反応管、２…加熱炉、３，４…成長室、５
，６…原料ソース、７，８…原料ガス導入管、９
…基板保持治具、１０…基板、１１…内管、１２
…戻り板。
図は従来例を示す断面図である。 １…反応管、２…加熱炉、３，４…成長室、５
，６…原料ソース、７，８…原料ガス導入管、９
…基板保持治具、１０…基板、１１…内管、１２
…戻り板。
Claims (1)
- 成長室を有する気相エピタキシアル成長装置に
おいて、反応管と内管の間から上流側に流れるガ
スの流れ方向を成長室下流側に向けて転換する戻
り板を備えたことを特徴とする気相エピタキシア
ル成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7130288U JPH01177278U (ja) | 1988-05-30 | 1988-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7130288U JPH01177278U (ja) | 1988-05-30 | 1988-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01177278U true JPH01177278U (ja) | 1989-12-18 |
Family
ID=31296512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7130288U Pending JPH01177278U (ja) | 1988-05-30 | 1988-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01177278U (ja) |
-
1988
- 1988-05-30 JP JP7130288U patent/JPH01177278U/ja active Pending