JPH01114680U - - Google Patents
Info
- Publication number
- JPH01114680U JPH01114680U JP692088U JP692088U JPH01114680U JP H01114680 U JPH01114680 U JP H01114680U JP 692088 U JP692088 U JP 692088U JP 692088 U JP692088 U JP 692088U JP H01114680 U JPH01114680 U JP H01114680U
- Authority
- JP
- Japan
- Prior art keywords
- piping
- vapor phase
- epitaxial growth
- growth apparatus
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000012808 vapor phase Substances 0.000 claims 2
- 230000005587 bubbling Effects 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 125000002524 organometallic group Chemical group 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の実施例１の配管系統図、第２
図は本考案の実施例２の配管系統図、第３図は従
来の配管の一例の配管系統図である。 １，２，３…ストツプ弁、４，５…容器と配管
の接続部継手、６…有機金属原料容器、７…恒温
槽、１１，１２…ストツプ弁、１３，１４…スト
ツプ弁（３方向弁）、１５…バイパス配管、２０
…ストツプ弁。
図は本考案の実施例２の配管系統図、第３図は従
来の配管の一例の配管系統図である。 １，２，３…ストツプ弁、４，５…容器と配管
の接続部継手、６…有機金属原料容器、７…恒温
槽、１１，１２…ストツプ弁、１３，１４…スト
ツプ弁（３方向弁）、１５…バイパス配管、２０
…ストツプ弁。
Claims (1)
- 有機金属を熱分解させる気相エピタキシアル成
長装置において有機金属原料容器接続部を、配管
内に停滞する空気及び原料ガスをバブリング用ガ
ス供給用配管からの置換用ガスの導入により完全
に排除するバイパス配管構造としたことを特徴と
する気相エピタキシアル成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP692088U JPH01114680U (ja) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP692088U JPH01114680U (ja) | 1988-01-22 | 1988-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01114680U true JPH01114680U (ja) | 1989-08-02 |
Family
ID=31211491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP692088U Pending JPH01114680U (ja) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01114680U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100358406B1 (ko) * | 2000-07-10 | 2002-10-25 | 주식회사 아펙스 | 압력조절수단을 구비한 액체소스 보관용기 |
| JP2009094401A (ja) * | 2007-10-11 | 2009-04-30 | Hitachi Kokusai Electric Inc | 基板処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59189931A (ja) * | 1983-04-11 | 1984-10-27 | Nippon Telegr & Teleph Corp <Ntt> | 反応性液体容器 |
-
1988
- 1988-01-22 JP JP692088U patent/JPH01114680U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59189931A (ja) * | 1983-04-11 | 1984-10-27 | Nippon Telegr & Teleph Corp <Ntt> | 反応性液体容器 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100358406B1 (ko) * | 2000-07-10 | 2002-10-25 | 주식회사 아펙스 | 압력조절수단을 구비한 액체소스 보관용기 |
| JP2009094401A (ja) * | 2007-10-11 | 2009-04-30 | Hitachi Kokusai Electric Inc | 基板処理装置 |