JPH01164756U - - Google Patents

Info

Publication number
JPH01164756U
JPH01164756U JP5920988U JP5920988U JPH01164756U JP H01164756 U JPH01164756 U JP H01164756U JP 5920988 U JP5920988 U JP 5920988U JP 5920988 U JP5920988 U JP 5920988U JP H01164756 U JPH01164756 U JP H01164756U
Authority
JP
Japan
Prior art keywords
vacuum
forming apparatus
cathode
film forming
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5920988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435413Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988059209U priority Critical patent/JPH0435413Y2/ja
Publication of JPH01164756U publication Critical patent/JPH01164756U/ja
Application granted granted Critical
Publication of JPH0435413Y2 publication Critical patent/JPH0435413Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988059209U 1988-04-30 1988-04-30 Expired JPH0435413Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988059209U JPH0435413Y2 (enrdf_load_stackoverflow) 1988-04-30 1988-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988059209U JPH0435413Y2 (enrdf_load_stackoverflow) 1988-04-30 1988-04-30

Publications (2)

Publication Number Publication Date
JPH01164756U true JPH01164756U (enrdf_load_stackoverflow) 1989-11-17
JPH0435413Y2 JPH0435413Y2 (enrdf_load_stackoverflow) 1992-08-21

Family

ID=31284993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988059209U Expired JPH0435413Y2 (enrdf_load_stackoverflow) 1988-04-30 1988-04-30

Country Status (1)

Country Link
JP (1) JPH0435413Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108018A1 (ja) * 2007-03-07 2008-09-12 Shinmaywa Industries, Ltd. 基板保持装置、ターゲット保持装置、及び真空成膜装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326443U (enrdf_load_stackoverflow) * 1976-08-13 1978-03-06
JPS5635767A (en) * 1979-08-30 1981-04-08 Fuji Kinzoku Kako:Kk Basket type electrostatic plating apparatus and plating method
JPS60255973A (ja) * 1984-04-12 1985-12-17 プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 真空中で材料を蒸発する方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326443U (enrdf_load_stackoverflow) * 1976-08-13 1978-03-06
JPS5635767A (en) * 1979-08-30 1981-04-08 Fuji Kinzoku Kako:Kk Basket type electrostatic plating apparatus and plating method
JPS60255973A (ja) * 1984-04-12 1985-12-17 プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 真空中で材料を蒸発する方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108018A1 (ja) * 2007-03-07 2008-09-12 Shinmaywa Industries, Ltd. 基板保持装置、ターゲット保持装置、及び真空成膜装置

Also Published As

Publication number Publication date
JPH0435413Y2 (enrdf_load_stackoverflow) 1992-08-21

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