JPH01164756U - - Google Patents
Info
- Publication number
- JPH01164756U JPH01164756U JP5920988U JP5920988U JPH01164756U JP H01164756 U JPH01164756 U JP H01164756U JP 5920988 U JP5920988 U JP 5920988U JP 5920988 U JP5920988 U JP 5920988U JP H01164756 U JPH01164756 U JP H01164756U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- forming apparatus
- cathode
- film forming
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims 4
- 238000010891 electric arc Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 229910000897 Babbitt (metal) Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は第一実施例になる真空成膜装置の要部
側断面図、第２図は第１図の一部割愛矢視図、
第３図は第二実施例になる真空成膜装置の要部側
断面図、第４図は第三実施例になる真空成膜装置
の要部側断面図、第５図は従来の真空成膜装置の
一例の構成説明図である。
１……真空容器、２……軸受金具、２ａ……軸
受孔、３……陰極、４……ターゲツト、５……凹
み、６，７……冷却水の給排通路、８……シール
リング、９……ボールナツト、１０……ボール螺
子、１１……レバー、１２……軸部、１３……リ
ンク、１４……アクチユエータ、１５……ターン
テーブル、１６……被処理体。
FIG. 1 is a sectional side view of the main part of the vacuum film forming apparatus according to the first embodiment, FIG. 2 is a partially omitted view of FIG.
3 is a sectional side view of the main part of the vacuum film forming apparatus according to the second embodiment, FIG. 4 is a sectional side view of the main part of the vacuum film forming apparatus according to the third embodiment, and FIG. FIG. 2 is a configuration explanatory diagram of an example of a membrane device. 1...Vacuum container, 2...Bearing metal fitting, 2a...Bearing hole, 3...Cathode, 4...Target, 5...Dent, 6, 7...Cooling water supply and discharge passage, 8...Seal ring , 9... Ball nut, 10... Ball screw, 11... Lever, 12... Shaft portion, 13... Link, 14... Actuator, 15... Turntable, 16... Processing object.
Claims (1)
極の表面に付設されたターゲツトの原子よりなる
薄膜を該真空容器内に収容された被処理体の表面
に付着形成させる真空成膜装置において、 前記陰極をその支持軸の軸心廻りに回転自在、
かつ前記被処理体に対して進退自在に作動させる
駆動装置を前記真空容器の外部に備えてなること
を特徴とする真空成膜装置。[Claims for Utility Model Registration] A cathode for arc discharge is provided in a vacuum container, and a thin film made of target atoms attached to the surface of the cathode is attached to the surface of an object to be processed housed in the vacuum container. In the vacuum film forming apparatus for forming the film, the cathode is rotatable around the axis of its support shaft,
A vacuum film forming apparatus characterized in that the vacuum film forming apparatus is equipped with a drive device outside the vacuum container that operates to move forward and backward with respect to the object to be processed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988059209U JPH0435413Y2 (en) | 1988-04-30 | 1988-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988059209U JPH0435413Y2 (en) | 1988-04-30 | 1988-04-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01164756U true JPH01164756U (en) | 1989-11-17 |
| JPH0435413Y2 JPH0435413Y2 (en) | 1992-08-21 |
Family
ID=31284993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988059209U Expired JPH0435413Y2 (en) | 1988-04-30 | 1988-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0435413Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008108018A1 (en) * | 2007-03-07 | 2008-09-12 | Shinmaywa Industries, Ltd. | Substrate holding device, target holding device, and vacuum film-forming apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5326443U (en) * | 1976-08-13 | 1978-03-06 | ||
| JPS5635767A (en) * | 1979-08-30 | 1981-04-08 | Fuji Kinzoku Kako:Kk | Basket type electrostatic plating apparatus and plating method |
| JPS60255973A (en) * | 1984-04-12 | 1985-12-17 | プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Method and device for evaporating material in vacuum |
-
1988
- 1988-04-30 JP JP1988059209U patent/JPH0435413Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5326443U (en) * | 1976-08-13 | 1978-03-06 | ||
| JPS5635767A (en) * | 1979-08-30 | 1981-04-08 | Fuji Kinzoku Kako:Kk | Basket type electrostatic plating apparatus and plating method |
| JPS60255973A (en) * | 1984-04-12 | 1985-12-17 | プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Method and device for evaporating material in vacuum |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008108018A1 (en) * | 2007-03-07 | 2008-09-12 | Shinmaywa Industries, Ltd. | Substrate holding device, target holding device, and vacuum film-forming apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0435413Y2 (en) | 1992-08-21 |