JPH01161325U - - Google Patents
Info
- Publication number
- JPH01161325U JPH01161325U JP5816188U JP5816188U JPH01161325U JP H01161325 U JPH01161325 U JP H01161325U JP 5816188 U JP5816188 U JP 5816188U JP 5816188 U JP5816188 U JP 5816188U JP H01161325 U JPH01161325 U JP H01161325U
- Authority
- JP
- Japan
- Prior art keywords
- exposed
- chuck
- view
- exposure apparatus
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5816188U JPH0517874Y2 (cg-RX-API-DMAC7.html) | 1988-04-28 | 1988-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5816188U JPH0517874Y2 (cg-RX-API-DMAC7.html) | 1988-04-28 | 1988-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01161325U true JPH01161325U (cg-RX-API-DMAC7.html) | 1989-11-09 |
| JPH0517874Y2 JPH0517874Y2 (cg-RX-API-DMAC7.html) | 1993-05-13 |
Family
ID=31283986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5816188U Expired - Lifetime JPH0517874Y2 (cg-RX-API-DMAC7.html) | 1988-04-28 | 1988-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517874Y2 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173316A (ja) * | 2004-12-15 | 2006-06-29 | Jeol Ltd | 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置 |
-
1988
- 1988-04-28 JP JP5816188U patent/JPH0517874Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173316A (ja) * | 2004-12-15 | 2006-06-29 | Jeol Ltd | 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517874Y2 (cg-RX-API-DMAC7.html) | 1993-05-13 |
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