JPH02717U - - Google Patents

Info

Publication number
JPH02717U
JPH02717U JP7715688U JP7715688U JPH02717U JP H02717 U JPH02717 U JP H02717U JP 7715688 U JP7715688 U JP 7715688U JP 7715688 U JP7715688 U JP 7715688U JP H02717 U JPH02717 U JP H02717U
Authority
JP
Japan
Prior art keywords
chuck
holding member
exposed
holding
gas suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7715688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519948Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7715688U priority Critical patent/JPH0519948Y2/ja
Publication of JPH02717U publication Critical patent/JPH02717U/ja
Application granted granted Critical
Publication of JPH0519948Y2 publication Critical patent/JPH0519948Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP7715688U 1988-06-10 1988-06-10 Expired - Lifetime JPH0519948Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7715688U JPH0519948Y2 (cg-RX-API-DMAC7.html) 1988-06-10 1988-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7715688U JPH0519948Y2 (cg-RX-API-DMAC7.html) 1988-06-10 1988-06-10

Publications (2)

Publication Number Publication Date
JPH02717U true JPH02717U (cg-RX-API-DMAC7.html) 1990-01-05
JPH0519948Y2 JPH0519948Y2 (cg-RX-API-DMAC7.html) 1993-05-25

Family

ID=31302151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7715688U Expired - Lifetime JPH0519948Y2 (cg-RX-API-DMAC7.html) 1988-06-10 1988-06-10

Country Status (1)

Country Link
JP (1) JPH0519948Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0519948Y2 (cg-RX-API-DMAC7.html) 1993-05-25

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