JPH01152448A - Image forming material - Google Patents
Image forming materialInfo
- Publication number
- JPH01152448A JPH01152448A JP31136287A JP31136287A JPH01152448A JP H01152448 A JPH01152448 A JP H01152448A JP 31136287 A JP31136287 A JP 31136287A JP 31136287 A JP31136287 A JP 31136287A JP H01152448 A JPH01152448 A JP H01152448A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive layer
- thin film
- film
- image
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 74
- 239000010408 film Substances 0.000 claims abstract description 61
- 239000010409 thin film Substances 0.000 claims abstract description 44
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 22
- 229920001225 polyester resin Polymers 0.000 claims abstract description 19
- 239000004645 polyester resin Substances 0.000 claims abstract description 19
- 239000005056 polyisocyanate Substances 0.000 claims abstract description 15
- 229920001228 polyisocyanate Polymers 0.000 claims abstract description 15
- 239000003999 initiator Substances 0.000 claims abstract description 10
- 150000001875 compounds Chemical class 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 27
- -1 polyethylene terephthalate Polymers 0.000 claims description 26
- 239000000853 adhesive Substances 0.000 claims description 23
- 230000001070 adhesive effect Effects 0.000 claims description 23
- 150000002736 metal compounds Chemical class 0.000 claims description 18
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 16
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 16
- 229920006395 saturated elastomer Polymers 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 239000012948 isocyanate Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract description 68
- 239000012790 adhesive layer Substances 0.000 abstract description 10
- 238000000034 method Methods 0.000 description 19
- 238000005530 etching Methods 0.000 description 10
- 238000003475 lamination Methods 0.000 description 10
- 229920000642 polymer Polymers 0.000 description 10
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 5
- 229910001887 tin oxide Inorganic materials 0.000 description 5
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 150000002978 peroxides Chemical class 0.000 description 3
- 150000003440 styrenes Chemical class 0.000 description 3
- 150000005846 sugar alcohols Polymers 0.000 description 3
- ARXKVVRQIIOZGF-UHFFFAOYSA-N 1,2,4-butanetriol Chemical compound OCCC(O)CO ARXKVVRQIIOZGF-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- GUUVPOWQJOLRAS-UHFFFAOYSA-N Diphenyl disulfide Chemical compound C=1C=CC=CC=1SSC1=CC=CC=C1 GUUVPOWQJOLRAS-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- AUNGANRZJHBGPY-SCRDCRAPSA-N Riboflavin Chemical compound OC[C@@H](O)[C@@H](O)[C@@H](O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-SCRDCRAPSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 150000003926 acrylamides Chemical class 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 150000001728 carbonyl compounds Chemical class 0.000 description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical class C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 2
- 150000008049 diazo compounds Chemical class 0.000 description 2
- GVPWHKZIJBODOX-UHFFFAOYSA-N dibenzyl disulfide Chemical compound C=1C=CC=CC=1CSSCC1=CC=CC=C1 GVPWHKZIJBODOX-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical class CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229920002601 oligoester Polymers 0.000 description 2
- 150000002898 organic sulfur compounds Chemical class 0.000 description 2
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 230000005180 public health Effects 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- KJCLYACXIWMFCC-UHFFFAOYSA-M sodium;5-benzoyl-4-hydroxy-2-methoxybenzenesulfonate Chemical group [Na+].C1=C(S([O-])(=O)=O)C(OC)=CC(O)=C1C(=O)C1=CC=CC=C1 KJCLYACXIWMFCC-UHFFFAOYSA-M 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229920001567 vinyl ester resin Polymers 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- JNYAEWCLZODPBN-JGWLITMVSA-N (2r,3r,4s)-2-[(1r)-1,2-dihydroxyethyl]oxolane-3,4-diol Chemical compound OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O JNYAEWCLZODPBN-JGWLITMVSA-N 0.000 description 1
- JOIRQYHDJINFGA-UHFFFAOYSA-N (7-aminophenothiazin-3-ylidene)azanium;acetate Chemical compound CC([O-])=O.C1=CC(=[NH2+])C=C2SC3=CC(N)=CC=C3N=C21 JOIRQYHDJINFGA-UHFFFAOYSA-N 0.000 description 1
- UYEDESPZQLZMCL-UHFFFAOYSA-N 1,2-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(C)C(C)=CC=C3SC2=C1 UYEDESPZQLZMCL-UHFFFAOYSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- AROCLDYPZXMJPW-UHFFFAOYSA-N 1-(octyldisulfanyl)octane Chemical compound CCCCCCCCSSCCCCCCCC AROCLDYPZXMJPW-UHFFFAOYSA-N 0.000 description 1
- NSOAQRMLVFRWIT-UHFFFAOYSA-N 1-ethenoxydecane Chemical compound CCCCCCCCCCOC=C NSOAQRMLVFRWIT-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- XXCVIFJHBFNFBO-UHFFFAOYSA-N 1-ethenoxyoctane Chemical compound CCCCCCCCOC=C XXCVIFJHBFNFBO-UHFFFAOYSA-N 0.000 description 1
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2,2'-azo-bis-isobutyronitrile Substances N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- RCSBILYQLVXLJG-UHFFFAOYSA-N 2-Propenyl hexanoate Chemical compound CCCCCC(=O)OCC=C RCSBILYQLVXLJG-UHFFFAOYSA-N 0.000 description 1
- PZGMUSDNQDCNAG-UHFFFAOYSA-N 2-Propenyl octanoate Chemical compound CCCCCCCC(=O)OCC=C PZGMUSDNQDCNAG-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- DSKYSDCYIODJPC-UHFFFAOYSA-N 2-butyl-2-ethylpropane-1,3-diol Chemical compound CCCCC(CC)(CO)CO DSKYSDCYIODJPC-UHFFFAOYSA-N 0.000 description 1
- WFUGQJXVXHBTEM-UHFFFAOYSA-N 2-hydroperoxy-2-(2-hydroperoxybutan-2-ylperoxy)butane Chemical compound CCC(C)(OO)OOC(C)(CC)OO WFUGQJXVXHBTEM-UHFFFAOYSA-N 0.000 description 1
- POYODSZSSBWJPD-UHFFFAOYSA-N 2-methylprop-2-enoyloxy 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOOC(=O)C(C)=C POYODSZSSBWJPD-UHFFFAOYSA-N 0.000 description 1
- YTPSFXZMJKMUJE-UHFFFAOYSA-N 2-tert-butylanthracene-9,10-dione Chemical compound C1=CC=C2C(=O)C3=CC(C(C)(C)C)=CC=C3C(=O)C2=C1 YTPSFXZMJKMUJE-UHFFFAOYSA-N 0.000 description 1
- HZGJTATYGAJRAL-UHFFFAOYSA-N 3,4,4a,5,6,7,8,8a-octahydro-2h-naphthalene-1,1-diol Chemical compound C1CCCC2C(O)(O)CCCC21 HZGJTATYGAJRAL-UHFFFAOYSA-N 0.000 description 1
- DSSAWHFZNWVJEC-UHFFFAOYSA-N 3-(ethenoxymethyl)heptane Chemical compound CCCCC(CC)COC=C DSSAWHFZNWVJEC-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- ARXVXVOLXMVYIT-UHFFFAOYSA-N 3-methylbutyl 2-(dimethylamino)benzoate Chemical compound CC(C)CCOC(=O)C1=CC=CC=C1N(C)C ARXVXVOLXMVYIT-UHFFFAOYSA-N 0.000 description 1
- IICCLYANAQEHCI-UHFFFAOYSA-N 4,5,6,7-tetrachloro-3',6'-dihydroxy-2',4',5',7'-tetraiodospiro[2-benzofuran-3,9'-xanthene]-1-one Chemical compound O1C(=O)C(C(=C(Cl)C(Cl)=C2Cl)Cl)=C2C21C1=CC(I)=C(O)C(I)=C1OC1=C(I)C(O)=C(I)C=C21 IICCLYANAQEHCI-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004709 Chlorinated polyethylene Substances 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- AUNGANRZJHBGPY-UHFFFAOYSA-N D-Lyxoflavin Natural products OCC(O)C(O)C(O)CN1C=2C=C(C)C(C)=CC=2N=C2C1=NC(=O)NC2=O AUNGANRZJHBGPY-UHFFFAOYSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- CUDSBWGCGSUXDB-UHFFFAOYSA-N Dibutyl disulfide Chemical compound CCCCSSCCCC CUDSBWGCGSUXDB-UHFFFAOYSA-N 0.000 description 1
- ZFDIRQKJPRINOQ-HWKANZROSA-N Ethyl crotonate Chemical compound CCOC(=O)\C=C\C ZFDIRQKJPRINOQ-HWKANZROSA-N 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- MZNHUHNWGVUEAT-XBXARRHUSA-N Hexyl crotonate Chemical compound CCCCCCOC(=O)\C=C\C MZNHUHNWGVUEAT-XBXARRHUSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 1
- OMRDSWJXRLDPBB-UHFFFAOYSA-N N=C=O.N=C=O.C1CCCCC1 Chemical compound N=C=O.N=C=O.C1CCCCC1 OMRDSWJXRLDPBB-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 108010076830 Thionins Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- KYIKRXIYLAGAKQ-UHFFFAOYSA-N abcn Chemical compound C1CCCCC1(C#N)N=NC1(C#N)CCCCC1 KYIKRXIYLAGAKQ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052946 acanthite Inorganic materials 0.000 description 1
- PEJLNXHANOHNSU-UHFFFAOYSA-N acridine-3,6-diamine;10-methylacridin-10-ium-3,6-diamine;chloride Chemical compound [Cl-].C1=CC(N)=CC2=NC3=CC(N)=CC=C3C=C21.C1=C(N)C=C2[N+](C)=C(C=C(N)C=C3)C3=CC2=C1 PEJLNXHANOHNSU-UHFFFAOYSA-N 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 229940072049 amyl acetate Drugs 0.000 description 1
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- MWZGUEWUOKSFNL-UHFFFAOYSA-N benzoic acid;styrene Chemical compound C=CC1=CC=CC=C1.OC(=O)C1=CC=CC=C1 MWZGUEWUOKSFNL-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000007859 condensation product Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000012954 diazonium Substances 0.000 description 1
- 150000001989 diazonium salts Chemical class 0.000 description 1
- XSBSXJAYEPDGSF-UHFFFAOYSA-N diethyl 3,5-dimethyl-1h-pyrrole-2,4-dicarboxylate Chemical compound CCOC(=O)C=1NC(C)=C(C(=O)OCC)C=1C XSBSXJAYEPDGSF-UHFFFAOYSA-N 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940105990 diglycerin Drugs 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- YQGOJNYOYNNSMM-UHFFFAOYSA-N eosin Chemical compound [Na+].OC(=O)C1=CC=CC=C1C1=C2C=C(Br)C(=O)C(Br)=C2OC2=C(Br)C(O)=C(Br)C=C21 YQGOJNYOYNNSMM-UHFFFAOYSA-N 0.000 description 1
- IINNWAYUJNWZRM-UHFFFAOYSA-L erythrosin B Chemical compound [Na+].[Na+].[O-]C(=O)C1=CC=CC=C1C1=C2C=C(I)C(=O)C(I)=C2OC2=C(I)C([O-])=C(I)C=C21 IINNWAYUJNWZRM-UHFFFAOYSA-L 0.000 description 1
- YCUBDDIKWLELPD-UHFFFAOYSA-N ethenyl 2,2-dimethylpropanoate Chemical compound CC(C)(C)C(=O)OC=C YCUBDDIKWLELPD-UHFFFAOYSA-N 0.000 description 1
- WNMORWGTPVWAIB-UHFFFAOYSA-N ethenyl 2-methylpropanoate Chemical compound CC(C)C(=O)OC=C WNMORWGTPVWAIB-UHFFFAOYSA-N 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- LZWYWAIOTBEZFN-UHFFFAOYSA-N ethenyl hexanoate Chemical compound CCCCCC(=O)OC=C LZWYWAIOTBEZFN-UHFFFAOYSA-N 0.000 description 1
- BLZSRIYYOIZLJL-UHFFFAOYSA-N ethenyl pentanoate Chemical compound CCCCC(=O)OC=C BLZSRIYYOIZLJL-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- MHCLJIVVJQQNKQ-UHFFFAOYSA-N ethyl carbamate;2-methylprop-2-enoic acid Chemical compound CCOC(N)=O.CC(=C)C(O)=O MHCLJIVVJQQNKQ-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- MCVVUJPXSBQTRZ-ONEGZZNKSA-N methyl (e)-but-2-enoate Chemical compound COC(=O)\C=C\C MCVVUJPXSBQTRZ-ONEGZZNKSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229940065472 octyl acrylate Drugs 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
- ATGUVEKSASEFFO-UHFFFAOYSA-N p-aminodiphenylamine Chemical compound C1=CC(N)=CC=C1NC1=CC=CC=C1 ATGUVEKSASEFFO-UHFFFAOYSA-N 0.000 description 1
- HVAMZGADVCBITI-UHFFFAOYSA-M pent-4-enoate Chemical compound [O-]C(=O)CCC=C HVAMZGADVCBITI-UHFFFAOYSA-M 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- ULDDEWDFUNBUCM-UHFFFAOYSA-N pentyl prop-2-enoate Chemical compound CCCCCOC(=O)C=C ULDDEWDFUNBUCM-UHFFFAOYSA-N 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- ZQMAPKVSTSACQB-UHFFFAOYSA-N prop-2-enyl dodecanoate Chemical compound CCCCCCCCCCCC(=O)OCC=C ZQMAPKVSTSACQB-UHFFFAOYSA-N 0.000 description 1
- HAFZJTKIBGEQKT-UHFFFAOYSA-N prop-2-enyl hexadecanoate Chemical compound CCCCCCCCCCCCCCCC(=O)OCC=C HAFZJTKIBGEQKT-UHFFFAOYSA-N 0.000 description 1
- AABBHSMFGKYLKE-SNAWJCMRSA-N propan-2-yl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC(C)C AABBHSMFGKYLKE-SNAWJCMRSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 239000002151 riboflavin Substances 0.000 description 1
- 229960002477 riboflavin Drugs 0.000 description 1
- 235000019192 riboflavin Nutrition 0.000 description 1
- 229940081623 rose bengal Drugs 0.000 description 1
- 229930187593 rose bengal Natural products 0.000 description 1
- STRXNPAVPKGJQR-UHFFFAOYSA-N rose bengal A Natural products O1C(=O)C(C(=CC=C2Cl)Cl)=C2C21C1=CC(I)=C(O)C(I)=C1OC1=C(I)C(O)=C(I)C=C21 STRXNPAVPKGJQR-UHFFFAOYSA-N 0.000 description 1
- KTOYYOQOGAZUHV-UHFFFAOYSA-N s-acetylsulfanyl ethanethioate Chemical compound CC(=O)SSC(C)=O KTOYYOQOGAZUHV-UHFFFAOYSA-N 0.000 description 1
- YYWLHHUMIIIZDH-UHFFFAOYSA-N s-benzoylsulfanyl benzenecarbothioate Chemical compound C=1C=CC=CC=1C(=O)SSC(=O)C1=CC=CC=C1 YYWLHHUMIIIZDH-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- ZFDIRQKJPRINOQ-UHFFFAOYSA-N transbutenic acid ethyl ester Natural products CCOC(=O)C=CC ZFDIRQKJPRINOQ-UHFFFAOYSA-N 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野〕
この発明は基材上に金属または金属化合物の薄膜、感光
層およびポリエチレンテレフタレートフィルムからなる
支持体がこの順に積層されてなる、パターン状露光と剥
離操作とによって湿式現像やエツチング操作を要するこ
となく所望の画像を形成することができる画像形成材料
に関する。Detailed Description of the Invention [Industrial Field of Application] This invention relates to patterned exposure, in which a thin film of a metal or metal compound, a photosensitive layer, and a support consisting of a polyethylene terephthalate film are laminated in this order on a base material. The present invention relates to an image forming material capable of forming a desired image by a peeling operation without requiring wet development or etching operations.
感光フィルムを用いて所望の画像を形成する技術は、古
くから知られている。この方法は、たとえば絶縁基板上
に銅箔などの導電層を設けてなる積層基板に感光フィル
ムを重ね合わせ、パターン状露光後湿式現像およびエツ
チング操作を経て絶縁基板上に所望パターンの導電層か
らなる画像を形成するものである。また、感光フィルム
として透明支持体上に光重合性組成物層からなる感光層
を設けてなる剥離現像タイプのものを用いたときは、パ
ターン状露光後透明支持体を剥離操作することにより、
導電層上に硬化したパターン化感光層を形成でき、この
場合は湿式現像が不要となってその後エツチング操作を
行うことによって上記同様の画像を形成できる。Techniques for forming desired images using photosensitive film have been known for a long time. In this method, a photosensitive film is laminated on a laminated substrate consisting of a conductive layer such as copper foil on an insulating substrate, and after pattern exposure, wet development and etching are performed to form a conductive layer in a desired pattern on the insulating substrate. It forms images. In addition, when using a peelable development type photosensitive film in which a photosensitive layer made of a photopolymerizable composition layer is provided on a transparent support, the transparent support can be peeled off after patterned exposure.
A cured patterned photosensitive layer can be formed on the conductive layer, in which case wet development is no longer necessary and images similar to those described above can be formed by subsequent etching operations.
しかるに、これらの画像形成技術では、パターン状露光
後エツチング操作を必ず行う必要があり、また剥離現像
タイプを除き湿式現像処理を行う必要もあるため、画像
形成のための工程が煩雑となるという不利があり、加え
てエツチング液や現像液の使用は公衆衛生上好ましくな
く、またコスト高となるなどの種々の不利があった。However, with these image forming techniques, it is necessary to carry out an etching operation after patterned exposure, and, except for the peel development type, it is also necessary to carry out a wet development process, which has the disadvantage of complicating the image forming process. In addition, the use of etching solutions and developing solutions has various disadvantages, such as being unfavorable from a public health standpoint and increasing costs.
そこで、これらの不利を回避した画像形成材料として、
基材上に画像を構成させるための金属または金属化合物
の薄膜を設けるとともに、この上に直接感光層を形成し
たもの(特開昭54−79027号公報)や、上記感光
層上にさらに補強のための支持体フィルムを適宜の接着
剤層を介して積層したもの(特開昭53−3215号公
報)が提案されている。これらの画像形成材料は、感光
層側からのパターン状露光によって露光部における感光
層と上記薄膜との接着力を増大させ、この露光後感光層
またはこれと接着剤層を介した支持体フィルムとを剥離
操作することにより、上記接着力の増大した露光部の上
記薄膜を一緒に剥離除去し、基材上に非露光部の上記薄
膜をパターン化画像として残存させるものである。Therefore, as an image forming material that avoids these disadvantages,
In some cases, a thin film of metal or metal compound is provided on a base material to form an image, and a photosensitive layer is directly formed on this (Japanese Patent Application Laid-open No. 79027/1989), or a thin film of a metal or metal compound is provided on the base material to form an image. A structure in which support films are laminated via a suitable adhesive layer has been proposed (Japanese Unexamined Patent Publication No. 53-3215). These image-forming materials increase the adhesive force between the photosensitive layer and the above-mentioned thin film in the exposed area by patternwise exposure from the photosensitive layer side, and after exposure, the adhesive force between the photosensitive layer or this and the support film via an adhesive layer is formed. By performing a peeling operation, the thin film in the exposed area where the adhesive strength has increased is peeled off and removed together, and the thin film in the non-exposed area remains on the substrate as a patterned image.
すなわち、これら提案に係る画像形成材料においては、
パターン状露光と剥離操作とを行うことにより、前記従
来の如きエツチング操作を要することなく、またエツチ
ング操作前の湿式現像処理を要することなく、基材上に
所望の画像を形成できるという特徴を有するため、画像
形成のための工程が簡素化され、またエツチング液や現
像液の使用に伴う公衆衛生上の問題やコスト高となると
いう問題などが解消される。That is, in the image forming materials according to these proposals,
By performing a patterned exposure and a peeling operation, a desired image can be formed on a substrate without requiring an etching operation as in the conventional method, and without requiring a wet development process before the etching operation. Therefore, the process for forming an image is simplified, and problems such as public health problems and high costs associated with the use of etching solutions and developing solutions are solved.
[発明が解決しようとする問題点〕
しかしながら、上記提案に係る画像形成材料は、上述の
如き利点を有するものの、以下の如き克服するべき問題
点があった。まず、基材に設けられた金属または金属化
合物の薄膜の上に感光層だけを形成した材料では、感光
層の剥離操作時にその強度を充分に保てず精密な剥離操
作を行いにくいという問題があった。また、上記感光層
とともに接着剤層を介して支持体フィルムを形成した材
料では、剥離操作時の強度は保てるものの、感光層また
は支持体フィルム上に接着剤を塗着しておく必要がある
ため、画像形成材料の製造工程上の不利をさけられず、
また接着剤の使用に伴うコスト高の問題もあり、そのう
え感光層と接着剤層を介した支持体フィルムとの一体的
な剥離操作が接着剤層の存在によって悪影響を受けやす
くなって、精密な剥離操作という面でやはり問題を有し
ていた。[Problems to be Solved by the Invention] However, although the image forming material according to the above proposal has the above-mentioned advantages, it has the following problems that need to be overcome. First, with materials in which only a photosensitive layer is formed on a thin film of metal or metal compound provided on a base material, there is a problem that the strength of the photosensitive layer cannot be maintained sufficiently during peeling operations, making it difficult to perform precise peeling operations. there were. In addition, with materials in which a support film is formed with the photosensitive layer via an adhesive layer, the strength during peeling can be maintained, but it is necessary to apply the adhesive on the photosensitive layer or support film. , unavoidable disadvantages in the manufacturing process of image forming materials,
There is also the problem of high costs associated with the use of adhesives, and in addition, the presence of the adhesive layer tends to adversely affect the integral peeling operation between the photosensitive layer and the support film via the adhesive layer, making it difficult to precisely There was still a problem with the peeling operation.
したがって、この発明は、上記提案に係るものと同様の
パターン状露光と剥離操作とによって基材上に所望パタ
ーンの画像を形成できるとともに、剥離操作時の強度の
問題とさらに接着剤の使用に伴う既述の如き問題を本質
的に有しない工業的利用価値のより高い画像形成材料を
提供することを目的としている。Therefore, this invention makes it possible to form an image of a desired pattern on a substrate by patterned exposure and peeling operation similar to those related to the above-mentioned proposal. It is an object of the present invention to provide an image-forming material that is essentially free from the above-mentioned problems and has higher industrial utility value.
この発明者らは、上記の目的を達成するために鋭意検討
した結果、基材上に設けられた金属または金属化合物の
薄膜の上に形成する感光層を特定の組成物で構成し、こ
の上に接着剤層を介することなく特定の支持体フィルム
を積層するようにしたときには、上記感光層と支持体フ
ィルムとの接着強度の大きい画像形成材料が得られ、こ
の材料によれば支持体フィルム側からのパターン状露光
後上記感光層および支持体フィルムを一体に剥離操作す
ることにより、前記提案に係るものと同様に湿式現像処
理やエツチング操作を要することなく、基材上に金属ま
たは金属化合物からなる所望パターンの画像を形成でき
、かつこの場合上記支持体フィルムによって剥離操作時
の強度を充分に保て、しかも接着剤の使用に起因した画
像形成材料の製造工程上およびコスト上の問題とさらに
剥離操作上の問題が一切回避されるものであることを知
り、この発明を完成するに至った。As a result of intensive studies to achieve the above object, the inventors have discovered that a photosensitive layer formed on a thin film of metal or metal compound provided on a base material is composed of a specific composition, and When a specific support film is laminated on the photosensitive layer and the support film without intervening an adhesive layer, an image forming material with high adhesive strength between the photosensitive layer and the support film can be obtained, and according to this material, the support film side By peeling off the photosensitive layer and the support film together after patterned exposure, the metal or metal compound can be removed from the base material without the need for wet development or etching as in the above proposal. It is possible to form an image with a desired pattern, and in this case, the above-mentioned support film can maintain sufficient strength during the peeling operation. This invention was completed based on the knowledge that problems in peeling operations can be completely avoided.
すなわち、この発明は、基材上に金属または金属化合物
の薄膜、感光層およびポリエチレンテレフタレートフィ
ルムからなる支持体がこの順に積層されてなり、上記支
持体側からのパターン状露光によって露光部における感
光層と上記薄膜との接着力が増大し、この露光後上記支
持体および感光層を剥離操作したときに上記接着力の増
大した露光部の上記薄膜が一緒に剥離除去されて、基材
上に非露光部の上記薄膜が画像として残存する、剥離操
作による画像形成が可能な画像形成材料であって、かつ
上記感光層が溶剤可溶性線状飽和ポリエステル樹脂、光
重合性不飽和化合物、光重合開始剤およびポリイソシア
ネート化合物を必須成分として含むことを特徴とする画
像形成材料に係るものである。That is, in the present invention, a thin film of a metal or metal compound, a photosensitive layer, and a support consisting of a polyethylene terephthalate film are laminated in this order on a base material, and the photosensitive layer and the photosensitive layer in the exposed area are formed by patterned exposure from the side of the support. The adhesive force with the thin film increases, and when the support and the photosensitive layer are peeled off after this exposure, the thin film in the exposed area where the adhesive force has increased is peeled off and removed, leaving the unexposed surface on the base material. An image forming material capable of forming an image by a peeling operation, in which the above-mentioned thin film remains as an image, and the above-mentioned photosensitive layer comprises a solvent-soluble linear saturated polyester resin, a photopolymerizable unsaturated compound, a photopolymerization initiator and The present invention relates to an image forming material characterized by containing a polyisocyanate compound as an essential component.
〔発明の構成・作用]
この発明における基材としては、表面平滑性を有してそ
の上に金属または金属化合物の薄膜を形成しうるもので
あれば特に限定されず、ガラス、プラスチックなどの種
々の素材からなるものが用いられる。形状も特に限定さ
れないが、一般にはシート状やフィルム状とされたもの
が好ましく使用される。上記のプラスチックの例として
は、ポリエステル、ポリアミド、ポリイミド、ポリオレ
フィン、ポリカーボネート、ポリスチレン、ビニル重合
型ポリマー、セルロース誘導体などが挙げられる。[Structure and operation of the invention] The base material in this invention is not particularly limited as long as it has a smooth surface and a thin film of metal or metal compound can be formed thereon, and various materials such as glass and plastic can be used. A material made of is used. Although the shape is not particularly limited, sheet-like or film-like materials are generally preferably used. Examples of the above-mentioned plastics include polyester, polyamide, polyimide, polyolefin, polycarbonate, polystyrene, vinyl polymerization type polymer, cellulose derivative, and the like.
この基材上に設けられ画像を構成させるための金属また
は金属化合物の薄膜としては、アルミニウム、銅、金、
銀、スズ、ニッケル、クロム、亜鉛、酸化スズ、酸化イ
ンジウム、酸化亜鉛、酸化けい素、臭化銀、硫化銀、硫
化亜鉛、弗化マグネシウムなどからなる厚みが20〜1
,000nmの薄膜が挙げられる。The metal or metal compound thin film provided on this base material to form an image includes aluminum, copper, gold,
Made of silver, tin, nickel, chromium, zinc, tin oxide, indium oxide, zinc oxide, silicon oxide, silver bromide, silver sulfide, zinc sulfide, magnesium fluoride, etc., with a thickness of 20 to 1
,000 nm thin film.
この発明における感光層は、溶剤可溶性線状飽和ポリエ
ステル樹脂、光重合性不飽和化合物、光”重合開始剤お
よびポリイソシアネート化合物を必須成分とし、これに
必要に応じて熱重合禁止剤、可塑剤、着色剤、光重合開
始促進剤、充てん剤、密着性付与剤などを含ませてなる
組成物からなり、その厚みは通常1〜30μの範囲にあ
るのが好ましい。The photosensitive layer in this invention contains a solvent-soluble linear saturated polyester resin, a photopolymerizable unsaturated compound, a photopolymerization initiator, and a polyisocyanate compound as essential components, and optionally a thermal polymerization inhibitor, a plasticizer, It is composed of a composition containing a coloring agent, a photopolymerization initiation accelerator, a filler, an adhesion promoter, etc., and the thickness thereof is usually preferably in the range of 1 to 30 μm.
溶剤可溶性線状飽和ポリエステル樹脂は、テレフタル酸
とエチレングリコールとのほかに他の適宜の多塩基性酸
ないしポリオールを共縮合成分とすることによって結晶
性を低下させたポリマーであって、その平均分子量が通
常約3万以下の低縮合体とされかつ分子両末端にカルボ
キシル基ないし水酸基を有する多くの溶剤に対して可溶
性のポリマーである。市販品としては、東洋紡績社製の
商品名バイロン−200、同300、日立化成工業社製
の商品名ニスペルー1310、同1510゜日本合成化
学工業社製の商品名ポリエスタ−3P−170、同LP
−011などが挙げられる。Solvent-soluble linear saturated polyester resin is a polymer whose crystallinity is reduced by co-condensing terephthalic acid and ethylene glycol with other appropriate polybasic acids or polyols, and its average molecular weight It is a polymer that is a low condensate, usually having a molecular weight of about 30,000 or less, and has a carboxyl group or a hydroxyl group at both ends of the molecule and is soluble in many solvents. Commercially available products include Byron-200 and 300 manufactured by Toyobo Co., Ltd., Nisperu 1310 and 1510° manufactured by Hitachi Chemical, and Polyester-3P-170 and LP manufactured by Nippon Gosei Chemical Industry Co., Ltd.
-011 etc. are mentioned.
このような溶剤可溶性線状飽和ポリエステル樹脂は、皮
膜形成能を有して感光層の他の成分である光重合性不飽
和化合物、光重合開始剤およびポリイソシアネート化合
物などのバインダとしての機能を果たすとともに、これ
ら成分を含む感光層上に接着剤層を介することなく積層
されるポリエチレンテレフタレートフィルムからなる支
持体と上記感光層との接着強度の向上に大きく寄与する
ものである。なお、パイイダポリマーとしては、上記の
ポリエステル樹脂のほかに、必要に応じて塩素化ポリエ
チレン、ポリメチルメタクリレートなどの各種のポリマ
ーを併用しても差し支えないが、この場合上記のポリエ
ステル樹脂が全ポリマー中受なくとも1重量%以上、好
適には10重量%以上となるようにするのがよい。上記
のポリエステル樹脂が少なくなりすぎると、支持体フィ
ルムとの接着強度の面で問題が生じやすい。Such a solvent-soluble linear saturated polyester resin has a film-forming ability and functions as a binder for other components of the photosensitive layer, such as a photopolymerizable unsaturated compound, a photoinitiator, and a polyisocyanate compound. In addition, it greatly contributes to improving the adhesive strength between the photosensitive layer and a support made of polyethylene terephthalate film that is laminated on the photosensitive layer containing these components without intervening an adhesive layer. In addition to the above-mentioned polyester resins, various polymers such as chlorinated polyethylene and polymethyl methacrylate may be used in combination as the PAYIDA polymer, but in this case, the above-mentioned polyester resin is the entire polymer. It is preferable that the amount is 1% by weight or more, preferably 10% by weight or more, even without the use of a middle support. If the amount of the polyester resin is too small, problems tend to occur in terms of adhesive strength with the support film.
光重合性不飽和化合物には、エチレン性不飽和結合を分
子内に1個有するモノエチレン性不飽和化合物と、上記
結合を分子内に2個またはそれ以上官するポリエチレン
性不飽和化合物とがあるが、後者のポリエチレン性不飽
和化合物を用いるのが特に好ましい。この光重合性不飽
和化合物は、−種に限らず、二種またはそれ以上を混合
して使用してもよい。Photopolymerizable unsaturated compounds include monoethylenically unsaturated compounds that have one ethylenically unsaturated bond in their molecule, and polyethylenically unsaturated compounds that have two or more of the above bonds in their molecule. However, it is particularly preferred to use the latter polyethylenically unsaturated compounds. This photopolymerizable unsaturated compound is not limited to one type, but may be used in combination of two or more types.
モノエチレン性不飽和化合物の例としては、アクリル酸
またはそのエステル類、メタクリル酸またはそのエステ
ル類、アクリルアミド類、メタクリルアミド類、アリル
化合物、ビニルエーテル類、ビニルエステル類、N−ビ
ニル化合物、スチレン類、クロトン酸エステル類などが
ある。Examples of monoethylenically unsaturated compounds include acrylic acid or its esters, methacrylic acid or its esters, acrylamides, methacrylamides, allyl compounds, vinyl ethers, vinyl esters, N-vinyl compounds, styrenes, These include crotonic acid esters.
その具体例としては、アクリル酸エステル類ではアクリ
ル酸プロピル、アクリル酸ブチル、アクリル酸アミル、
アクリル酸2−エチルヘキシル、アクリル酸オクチルな
どが、メタクリル酸エステル類ではメタクリル酸メチル
、メタクリル酸エチル、メタクリル酸プロピル、メタク
リル酸イソプロピルなどが、アクリルアミド類ではアク
リルアミドや、N−アルキル基がメチル基、エチル基、
ブチル基、イソプロピル基、tert−ブチル基、2−
エチルヘキシル基などからなるN−アルキルアクリルア
ミドなどが、メタクリルアミド類ではメタクリルアミド
や、N−アルキル基がメチル基、エチル基、イソプロピ
ル基、tert−ブチル基、2−エチルヘキシル基など
からなるN−アルキルメタクリルアミドなどがある。Specific examples of acrylic esters include propyl acrylate, butyl acrylate, amyl acrylate,
2-ethylhexyl acrylate, octyl acrylate, etc.; methacrylate esters include methyl methacrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate, etc.; acrylamides include acrylamide, N-alkyl group is methyl group, ethyl group, etc. basis,
Butyl group, isopropyl group, tert-butyl group, 2-
N-alkyl acrylamide, which consists of an ethylhexyl group, etc., is methacrylamide, and N-alkyl methacrylate, whose N-alkyl group is a methyl group, ethyl group, isopropyl group, tert-butyl group, 2-ethylhexyl group, etc. There are amides, etc.
また、アリル化合物では酢酸アリル、カプロン酸アリル
、カプリル酸アリル、ラウリン酸アリル、パルミチン酸
アリルなどのアリルエステル類が、ビニルエーテル類で
はヘキシルビニルエーテル、オクチルビニルエーテル、
デシルビニルエーテル、2−エチルヘキシルビニルエー
テルなどのアルキルビニルエーテルが、ビニルエステル
類ではビニルブチレート、ビニルイソブチレート、ビニ
ルトリメチルアセテート、ビニルジエチルアセテート、
ビニルバレレート、ビニルカプロエートなどが、N−ビ
ニル化合物ではN−ビニルピロリドンなどが、スチレン
類ではスチレン、メチルスチレン、クロルメチルスチレ
ン、アルコキシスチレン、ハロゲン化スチレン、安息香
酸スチレンなどが、クロトン酸エステル類ではクロトン
酸メチル、クロトン酸エチル、クロトン酸ブチル、クロ
トン酸ヘキシル、クロトン酸イソプロピルなどがある。In addition, allyl compounds include allyl esters such as allyl acetate, allyl caproate, allyl caprylate, allyl laurate, and allyl palmitate, and the vinyl ethers include hexyl vinyl ether, octyl vinyl ether,
Alkyl vinyl ethers such as decyl vinyl ether and 2-ethylhexyl vinyl ether, vinyl esters such as vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate,
Vinyl valerate, vinyl caproate, etc., N-vinyl compounds such as N-vinylpyrrolidone, styrenes such as styrene, methylstyrene, chloromethylstyrene, alkoxystyrene, halogenated styrene, styrene benzoate, etc., and crotonic acid. Esters include methyl crotonate, ethyl crotonate, butyl crotonate, hexyl crotonate, and isopropyl crotonate.
つぎに、ポリエチレン性不飽和化合物の例としては、多
価アルコールのポリアクリレート類およびポリメタクリ
レート類が挙げられる。上記多価アルコールとしては、
ポリエチレングリコール、ポリプロピレンオキシド、ポ
リブチレンオキシド、(β−ヒドロキシエトキシ)ベン
ゼン、グリセリン、ジグリセリン、ネオペンチルグリコ
ール、トリメチロールプロパン、トリメチロールプロパ
ン、ペンタエリスリトール、ジペンタエリスリトール、
ソルビタン、ソルビトール、1・4−ブタンジオール、
1・2・4−ブタントリオール、2−ブテンート4−ジ
オール、2−ブチル−2−エチル−プロパンジオール、
2−ブテンート4−ジオール、1・3−プロパンジオー
ル、トリエタノールアミン、デカリンジオール、3−ク
ロルート2−プロパンジオールなどがある。Next, examples of polyethylenically unsaturated compounds include polyacrylates and polymethacrylates of polyhydric alcohols. The polyhydric alcohol mentioned above is
Polyethylene glycol, polypropylene oxide, polybutylene oxide, (β-hydroxyethoxy)benzene, glycerin, diglycerin, neopentyl glycol, trimethylolpropane, trimethylolpropane, pentaerythritol, dipentaerythritol,
Sorbitan, sorbitol, 1,4-butanediol,
1,2,4-butanetriol, 2-butenoto-4-diol, 2-butyl-2-ethyl-propanediol,
Examples include 2-butenoto-4-diol, 1,3-propanediol, triethanolamine, decalindiol, and 3-chloroto-2-propanediol.
また、ポリエチレン性不飽和化合物の他の例としては、
オリゴエステルアクリレート、オリゴエステルメタクリ
レート、エポキシアクリレート、エポキシメタクリレー
ト、ウレタンアクリレート、ウレタンメタクリレートな
どの名称で市販されている分子内にアクリロイル基また
はメタクリロイル基を2個以上有するアクリレートオリ
ゴマーやメタクリレートオリゴマーなどがある。In addition, other examples of polyethylenically unsaturated compounds include:
There are acrylate oligomers and methacrylate oligomers having two or more acryloyl groups or methacryloyl groups in the molecule, which are commercially available under the names of oligoester acrylate, oligoester methacrylate, epoxy acrylate, epoxy methacrylate, urethane acrylate, urethane methacrylate, etc.
このような光重合性不飽和化合物は、溶剤可溶性線状飽
和ポリエステル樹脂(他のバインダポリマーを併用する
ときはこれらを含めた合計量)100重量部に対して通
常5〜200重量部、特に好ましくは10〜100重量
部の範囲とするのがよい。過少となっても、また過多と
なっても、パターン状露光後の剥離操作により、精密な
画像形成を行いにくく、好ましくない。Such a photopolymerizable unsaturated compound is usually 5 to 200 parts by weight, particularly preferably 5 to 200 parts by weight, per 100 parts by weight of the solvent-soluble linear saturated polyester resin (total amount including other binder polymers when used together). is preferably in the range of 10 to 100 parts by weight. If it is too small or too large, it will be difficult to form precise images due to the peeling operation after patterned exposure, which is not preferable.
光重合開始剤としては、カルボニル化合物、有機硫黄化
合物、過酸化物、レドックス系化合物、アゾならびにジ
アゾ化合物、光還元性色素などの前記の光重合性不飽和
化合物の重合開始剤として知られるものがいずれも使用
可能である。Examples of the photopolymerization initiator include those known as polymerization initiators for the photopolymerizable unsaturated compounds, such as carbonyl compounds, organic sulfur compounds, peroxides, redox compounds, azo and diazo compounds, and photoreducible dyes. Both can be used.
上記のカルボニル化合物としては、ベンゾイン、ベンゾ
フェノン、アントラキノン、2−メチルアントラキノン
、2−t e r t−ブチルアントラキノン、9・1
0−フェナントレンキノン、ジアセチル、ベンジル、ミ
ヒラーズケトン、4・4′−ビスジエチルアミノベンゾ
フェノンなどが、有機硫黄化合物としては、ジブチルジ
スルフィド、ジオクチルジスルフィド、ジベンジルジス
ルフィド、ジフェニルジスルフィド、ジベンゾイルジス
ルフィド、ジアセチルジスルフィドなどがある。The above carbonyl compounds include benzoin, benzophenone, anthraquinone, 2-methylanthraquinone, 2-tert-butylanthraquinone, 9.1
Examples of organic sulfur compounds include dibutyl disulfide, dioctyl disulfide, dibenzyl disulfide, diphenyl disulfide, dibenzoyl disulfide, diacetyl disulfide, etc. .
また、過酸化物としては、過酸化水素、ジーtert−
ブチルペルオキシド、過酸化ベンゾイル、メチルエチル
ケトンペルオキシドなどが、レドックス系化合物として
は、過酸化物と還元剤の組み合わせからなるもの、たと
えば第一鉄イオンと過酸化水素、第一鉄イオンと過硫酸
イオン、第二鉄イオンと過酸化物などが、アゾおよびジ
アゾ化合物としては、α・α−アゾビスイソブチロニト
リル、2−アゾビス−2−メチルブチロニトリル、1−
アゾビス−シクロヘキサンカルボニトリル、p−アミノ
ジフェニルアミンのジアゾニウム塩などが、光還元性色
素としては、ローズベンガル、エリスロシン、エオシン
、アクリフラビン、リボフラビン、チオニンなどがある
。In addition, as peroxides, hydrogen peroxide, g-tert-
Butyl peroxide, benzoyl peroxide, methyl ethyl ketone peroxide, etc. are used as redox compounds. Examples of azo and diazo compounds include diiron ion and peroxide, α・α-azobisisobutyronitrile, 2-azobis-2-methylbutyronitrile, 1-
Examples of photoreducible dyes include azobis-cyclohexanecarbonitrile and diazonium salt of p-aminodiphenylamine, and examples of photoreducible dyes include rose bengal, erythrosin, eosin, acriflavin, riboflavin, and thionin.
これら光重合開始剤は1種であっても2種以上を組み合
わせて用いてもよい。その使用量は、前記の溶剤可溶性
線状飽和ポリエステル樹脂(他のバインダポリマーを併
用するときはこれらを含めた合計量)100重量部に対
して通常01〜20重量部の範囲とすればよい。These photopolymerization initiators may be used alone or in combination of two or more. The amount used may be generally in the range of 01 to 20 parts by weight per 100 parts by weight of the above-mentioned solvent-soluble linear saturated polyester resin (total amount including other binder polymers when used together).
ポリイソシアネート化合物としては、トリレンジイソシ
アネート、ヘキサメチレンジイソシアネート、シクロヘ
キサンジイソシアネートなどの芳香族、脂肪族、脂環族
の各種単量体のほか、これらの二量体や三量体などの多
量体、あるいはこれらと多価アルコールとの付加反応物
などポリウレタン用のインシアネート成分として知られ
るものがいずれも使用できる。Polyisocyanate compounds include various aromatic, aliphatic, and alicyclic monomers such as tolylene diisocyanate, hexamethylene diisocyanate, and cyclohexane diisocyanate, as well as multimers such as dimers and trimers of these monomers, and Any known incyanate components for polyurethane, such as addition reaction products of these and polyhydric alcohols, can be used.
このようなポリイソシアネート化合物は、感光層の形成
時に溶剤可溶性線状飽和ポリエステル樹脂に含まれるカ
ルボキシル基や水酸基と反応して感光層を架橋構造化さ
せ、これによって感光層の凝集力を大きくして層強度を
高める役割を果たすとともに、ポリエチレンテレフタレ
ートフィルムからなる支持体の表面に存在する上記同様
の極性基との反応にも関与して感光層と上記支持体との
接着強度の向上に大きく寄与するものである。Such a polyisocyanate compound reacts with carboxyl groups and hydroxyl groups contained in the solvent-soluble linear saturated polyester resin during formation of the photosensitive layer to create a crosslinked structure in the photosensitive layer, thereby increasing the cohesive force of the photosensitive layer. In addition to playing a role in increasing the layer strength, it also participates in a reaction with the same polar groups as above that are present on the surface of the support made of polyethylene terephthalate film, and greatly contributes to improving the adhesive strength between the photosensitive layer and the support. It is something.
このポリイソシアネート化合物は1種であっても2種ま
たはそれ以上を組み合わせて使用してもよい。また、そ
の使用量は、溶剤可溶性線状飽和ポリエステル樹脂(他
のバインダポリマーを併用するときはこれらを含めた合
計量)100重量部に対して通常01〜20重量部、特
に好ましくは1〜10重量部の範囲とするのがよい。These polyisocyanate compounds may be used alone or in combination of two or more. The amount used is usually 01 to 20 parts by weight, particularly preferably 1 to 10 parts by weight, per 100 parts by weight of the solvent-soluble linear saturated polyester resin (total amount including other binder polymers when used together). It is preferable to set it in the range of parts by weight.
この発明における支持体は、ポリエチレンテレフタレー
トフィルム、つまりテレフタル酸とエチレングリコール
との高縮合体であって、結晶性の高い通常の溶剤に不溶
性のポリマーからなるフィルムであり、その厚みとして
は通常3〜50/”程度である。このようなポリエチレ
ンテレフタレートフィルムは、感光層の補強効果を発揮
させるのに好都合なすぐれた機械的強度を備えていると
ともに、このフィルム側からのパターン状露光を可能と
する良好な透明性を有し、しかもこのフィルム上に感光
層を形成する際に加わる熱に対して安定でかつ吸湿の影
響も受けにくいというすぐれた耐熱性および吸湿性を有
している。The support in this invention is a polyethylene terephthalate film, that is, a high condensation product of terephthalic acid and ethylene glycol, which is a film made of a polymer that is highly crystalline and insoluble in ordinary solvents, and its thickness is usually 3 to 3. 50/''. Such a polyethylene terephthalate film has excellent mechanical strength, which is convenient for exerting a reinforcing effect on the photosensitive layer, and also enables patterned exposure from the film side. It has good transparency, is stable against heat applied when forming a photosensitive layer on this film, and has excellent heat resistance and hygroscopicity that is not easily affected by moisture absorption.
この発明者らは、この発明の完成に先立ち、ポリエチレ
ンテレフタレートフィルムの上述の如き性質に着目し、
感光層の補強用支持体としては上記フィルムが最も適し
ているものと考え、この考えのもとに上記フィルムとの
接着強度を満足する、つまり接着剤層を介在させなくて
も大きな接着強度が得られる感光層の組成につき種々検
討を加えた結果、既述したような溶剤可溶性線状飽和ポ
リエステル樹脂、光重合性不飽和化合物、光重合開始剤
およびポリイソシアネート化合物を必須成分として含む
組成物にて感光層を構成させるようにしたときには、こ
の感光層と上記支持体フィルムとの接着強度を充分に満
足させることができ、その結果パターン状露光後の上記
支持体および感光層の剥離操作を非常に良好に行えるこ
とを見い出したものである。Prior to completing this invention, the inventors focused on the above-mentioned properties of polyethylene terephthalate film,
We believe that the above-mentioned film is the most suitable support for reinforcing the photosensitive layer, and based on this idea, we developed a film that satisfies the adhesive strength with the above-mentioned film, that is, a large adhesive strength is achieved even without the interposition of an adhesive layer. As a result of various studies on the composition of the resulting photosensitive layer, we found a composition containing as essential components a solvent-soluble linear saturated polyester resin, a photopolymerizable unsaturated compound, a photopolymerization initiator, and a polyisocyanate compound as described above. When the photosensitive layer is constructed using a photosensitive layer, the adhesion strength between the photosensitive layer and the support film can be sufficiently satisfied, and as a result, the peeling operation of the support and the photosensitive layer after patterned exposure can be made extremely easy. It has been found that this method can be used satisfactorily.
この発明の画像形成材料は、以上説明してきた基材、金
属または金属化合物の薄膜、感光層およびポリエチレン
テレフタレートフィルムからなる支持体をこの順に積層
してなるものであるが、上記積層の手段は任意である。The image forming material of the present invention is formed by laminating in this order the base material described above, a thin film of metal or metal compound, a photosensitive layer, and a support consisting of a polyethylene terephthalate film, but the means of lamination may be arbitrary. It is.
しかし、一般には、まず、基材上にスパッタリング法、
真空蒸着法、無電解メツキ法などの公知の薄膜形成技術
によって金属または金属化合物の薄膜を形成して積層基
板をつくり、つぎにこの基板の上記薄膜上に感光層およ
び上記支持体を積層する方法が好ましく採用される。However, in general, first, a sputtering method is applied onto the base material.
A method in which a thin film of metal or metal compound is formed by a known thin film forming technique such as a vacuum evaporation method or an electroless plating method to create a laminated substrate, and then a photosensitive layer and the support are laminated on the thin film of this substrate. is preferably adopted.
ここで、上記の積層基板への感光層および上記支持体の
積層は、積層基板の金属または金属化合物の薄膜の上に
感光層を形成したのちこれに支持体を加熱ラミネートす
る方法(以下、これを二段ラミネート法という)で行っ
てもよいし、支持体上に感光層を形成してなる感光フィ
ルムを予め作製しておき、これと積層基板とを感光層と
金属または金属化合物の薄膜とが接触するように加熱ラ
ミネートする方法(以下、これを−段ラミネート法とい
う)で行ってもよい。Here, the lamination of the photosensitive layer and the support on the laminated substrate is carried out by forming a photosensitive layer on a thin film of metal or metal compound of the laminated substrate, and then heating and laminating the support thereon (hereinafter referred to as this method). Alternatively, a photosensitive film formed by forming a photosensitive layer on a support may be prepared in advance, and this and a laminated substrate may be laminated with a photosensitive layer and a thin film of a metal or metal compound. It may be carried out by a method of heating and laminating so that the two layers are in contact with each other (hereinafter, this is referred to as a -stage lamination method).
感光層の形成は、前記した溶剤可溶性線状飽和ポリエス
テル樹脂、光重合性不飽和化合物、光重合開始剤および
ポリイソシアネート化合物を必須成分として含む組成物
を塗着する方法、つまり通常は上記組成物を適宜の溶剤
に均一に溶解混合してなる塗布液を調製し、これを塗布
、乾燥する方法にて行われる。上記の溶剤としては、ア
セトン、メチルエチルケトン、メチルイソブチルケトン
などのケトン類、トルエン、ベンゼン、キシレンなどの
芳香族炭化水素類、酢酸エチル、酢酸ブチル、酢酸アミ
ルなどのエステル類、四塩化炭素、クロロホルム、トリ
クロロエチレン、塩化メチレンなトノハロゲン化炭化水
素類、ジエチルエーテル、テトラヒドロフラン、ジオキ
サン、エチレングリコールモノメチルエーテルなどのエ
ーテル類、ジメチルホルムアミド、ジメチルスルホキシ
ドなどが用いられる。The photosensitive layer is formed by applying a composition containing the above-mentioned solvent-soluble linear saturated polyester resin, a photopolymerizable unsaturated compound, a photopolymerization initiator, and a polyisocyanate compound as essential components, that is, usually the above-mentioned composition. This is carried out by preparing a coating solution by uniformly dissolving and mixing these in an appropriate solvent, applying the solution, and drying it. Examples of the above solvents include ketones such as acetone, methyl ethyl ketone, and methyl isobutyl ketone, aromatic hydrocarbons such as toluene, benzene, and xylene, esters such as ethyl acetate, butyl acetate, and amyl acetate, carbon tetrachloride, chloroform, Used are tonohalogenated hydrocarbons such as trichloroethylene and methylene chloride, ethers such as diethyl ether, tetrahydrofuran, dioxane, and ethylene glycol monomethyl ether, dimethylformamide, and dimethyl sulfoxide.
前記−段ラミネート法では、上記の塗布、乾燥後、つま
りポリエチレンテレフタレートフィルムからなる支持体
上に上記の塗布液を塗布、乾燥したのち、組成物中のポ
リイソシアネート化合物が反応するに充分な後加熱処理
を施すのが好ましい。In the one-stage lamination method, after the above coating and drying, that is, after the coating solution is coated on a support made of polyethylene terephthalate film and dried, post-heating is applied to a temperature sufficient to cause the polyisocyanate compound in the composition to react. It is preferable to perform treatment.
この後加熱処理は、高温にするほど短時間ですむが、あ
まり高温にしすぎると光重合性不飽和化合物の熱反応を
引きおこすおそれがあるため、通常は30〜80℃で1
〜48時間の条件とするのがよい。The higher the temperature, the shorter the time required for the subsequent heat treatment, but if the temperature is too high there is a risk of causing a thermal reaction of the photopolymerizable unsaturated compound, so it is usually heated at 30 to 80°C for 1 to 10 minutes.
It is preferable to set the condition to 48 hours.
上記の後加熱処理によってポリイソシアネート化合物を
反応させると、感光層の凝集力が大きくなって層強度を
高めうるとともに、支持体表面のカルボキシル基や水酸
基などの極性基との反応にも関与する結果、この支持体
と感光層との接着強度の向上に好結果を得ることができ
る。When the polyisocyanate compound is reacted by the above-mentioned post-heat treatment, the cohesive force of the photosensitive layer increases and the layer strength can be increased, and it also participates in reactions with polar groups such as carboxyl groups and hydroxyl groups on the surface of the support. , good results can be obtained in improving the adhesive strength between the support and the photosensitive layer.
一方、前記二段ラミネート法では、積層基板の金属また
は金属化合物の薄膜の上に前記の塗布液を塗布、乾燥し
て感光層を形成したのち、この上にポリエチレンテレフ
タレートフィルムからなる支持体を加熱ラミネートする
前に、上述と同様の後加熱処理を施すと、感光層の凝集
力の向上に役立っても上記支持体との接着強度の向上に
は寄与しない。この場合は、上記後加熱処理を施すこと
なく、直ちに上記支持体を加熱ラミネートするのが望ま
しく、この加熱ラミネート時に支持体表面の極性基とポ
リイソシアネート化合物との反応を期待でき、これによ
って上記接着強度の向上をある程度図ることができる。On the other hand, in the two-stage lamination method, the coating solution is applied onto the thin film of metal or metal compound of the laminated substrate and dried to form a photosensitive layer, and then a support made of polyethylene terephthalate film is heated on top of this. If a post-heat treatment similar to that described above is performed before lamination, although it may help improve the cohesive force of the photosensitive layer, it will not contribute to improving the adhesive strength with the support. In this case, it is desirable to heat-laminate the support immediately without performing the post-heat treatment. During this heat-lamination, it is expected that the polar groups on the surface of the support will react with the polyisocyanate compound, thereby improving the adhesion. Strength can be improved to some extent.
しかし、−段ラミネート法における上記後加熱処理によ
る接着強度の向上に較べれば、かなり見劣りするのを免
れない。However, compared to the improvement in adhesive strength achieved by the above-mentioned post-heat treatment in the -stage lamination method, it cannot be avoided that this improvement is considerably inferior.
したがって、この観点からいえば、−段ラミネート法が
最も好ましい方法として推奨できるものである。Therefore, from this point of view, the two-stage lamination method can be recommended as the most preferable method.
このようにして得られるこの発明の画像形成材料を用い
て所望パターンの画像を形成するには、まず、ポリエチ
レンテレフタレートフィルムからなる支持体側にパター
ンを有するポジ原稿を密着させ、この上から露光する。In order to form an image with a desired pattern using the thus obtained image forming material of the present invention, first, a positive original having a pattern is brought into close contact with a support made of a polyethylene terephthalate film, and light is exposed from above.
この露光に用いる光源としては、300〜500nmの
範囲の波長からなる光を含む光源、たとえば高圧水銀灯
、超高圧水銀灯、キセノン灯、カーボンアーク灯、メタ
ルハライド灯などがある。このような露光により、露光
部の感光層は重合反応をおこし、下地となる金属または
金属化合物の薄膜との接着力が非露光部の感光層のそれ
に比し著しく増大する。Light sources used for this exposure include light sources containing light having a wavelength in the range of 300 to 500 nm, such as high-pressure mercury lamps, ultra-high pressure mercury lamps, xenon lamps, carbon arc lamps, and metal halide lamps. By such exposure, the photosensitive layer in the exposed areas undergoes a polymerization reaction, and its adhesive strength with the underlying thin film of metal or metal compound increases significantly compared to that of the photosensitive layer in the non-exposed areas.
このようにして感光層と金属または金属化合物の薄膜と
の接着力に露光部と非露光部との間で変化を生じさせた
のち、支持体および感光層を一体に引き剥がす剥離操作
を施すと、上記接着力の増大した露光部の上記薄膜が上
記支持体および感光層と一緒に剥離除去されて、基材上
に非露光部の上記薄膜が残存する。つまり、この残存薄
膜によって前記ポジ原稿どおりのパターンを有するポジ
画像が形成されることになる。After the adhesive strength between the photosensitive layer and the metal or metal compound thin film is changed between the exposed and non-exposed areas in this way, a peeling operation is performed to peel off the support and the photosensitive layer as one piece. Then, the thin film in the exposed area where the adhesive strength has increased is peeled off together with the support and the photosensitive layer, and the thin film in the non-exposed area remains on the substrate. In other words, this remaining thin film forms a positive image having a pattern similar to the positive original.
「発明の効果」
以上詳述したとおり、この発明の画像形成材料によれば
、パターン状露光と剥離操作とによって所望パターンの
画像を形成できるから、従来の如き湿式現像処理やエツ
チング操作が不要となるという利点が得られるうえに、
感光層上に積層された特定の支持体フィルムによって剥
離操作を良好に行うことができ、かつこの支持体フィル
ムと感光層とが接着剤層を介することなく接着強度良好
に積層されているため、接着剤の使用に起因した画像形
成材料の製造工程上、コスト上および剥離操作上の問題
を本質的に解消できるという効果が得られる。"Effects of the Invention" As detailed above, according to the image forming material of the present invention, an image with a desired pattern can be formed by patterned exposure and a peeling operation, so that conventional wet development processing and etching operations are unnecessary. In addition to having the advantage of becoming
The specific support film laminated on the photosensitive layer allows the peeling operation to be performed well, and the support film and the photosensitive layer are laminated with good adhesive strength without intervening an adhesive layer. The effect is obtained that problems in the manufacturing process, cost, and peeling operation of image forming materials caused by the use of adhesives can be essentially eliminated.
このため、この発明の画像形成材料は、第2原図、製版
用フィルム、プリント配線板、液晶などの透明電極パタ
ーン、平版印刷用板などの幅広い用途に対して非常に有
用である。Therefore, the image forming material of the present invention is very useful for a wide range of applications such as second original drawings, plate-making films, printed wiring boards, transparent electrode patterns for liquid crystals, etc., and lithographic printing plates.
以下に、この発明の実施例を記載してより具体的に説明
する。なお、以下において、部とあるは重量部を意味す
るものとする。EXAMPLES Below, examples of the present invention will be described in more detail. In addition, in the following, parts shall mean parts by weight.
実施例1
溶剤可溶性線状飽和ポリエステル樹脂 100部(東
洋紡績社製商品名バイロン−200)トリメチロールプ
ロパントリアクリレート 50部ジメチルチオキサ
ントン 3部ジメチルアミノ安息香酸イソ
アミル 2部ハイドロキノン
01部酢酸エチル 250部
上記の組成物を混合し塗布液を調製した。この塗布液を
25p厚のポリエチレンテレフタレートフィルムからな
る支持体上に乾燥後の厚みが10Fとなるように塗布し
、80℃で10分間乾燥した。その後、50℃で48時
間放置して、感光フィルムを作製した。Example 1 Solvent-soluble linear saturated polyester resin 100 parts (Toyobo Co., Ltd., trade name Vylon-200) Trimethylolpropane triacrylate 50 parts Dimethylthioxanthone 3 parts Isoamyl dimethylaminobenzoate 2 parts Hydroquinone
01 parts Ethyl acetate 250 parts The above compositions were mixed to prepare a coating solution. This coating solution was coated onto a support made of a 25p thick polyethylene terephthalate film so that the thickness after drying would be 10F, and dried at 80°C for 10 minutes. Thereafter, it was left to stand at 50° C. for 48 hours to produce a photosensitive film.
一方、100pn厚のポリエチレンテレフタレートフィ
ルムからなる基材上に真空蒸着法により約500nm厚
のアルミニウム薄膜を形成して積層基板とし、この基板
と前記の感光フィルムとを感光層とアルミニウム薄膜と
が接触するように100℃にセットしたロールラミネー
タで加熱ラミネートして、この発明の画像形成材料を作
製した。On the other hand, a thin aluminum film of about 500 nm thick is formed by vacuum evaporation on a base material made of a polyethylene terephthalate film of 100 pn thickness to form a laminated substrate, and the photosensitive layer and the aluminum thin film are brought into contact with this substrate and the photosensitive film. The image forming material of the present invention was prepared by heat lamination using a roll laminator set at 100°C.
この画像形成材料の支持体側に所定パターンを有するポ
ジ原稿を重ね、3KW超高圧水銀灯より100 mJ
/cmの露光量で露光したのち、支持体および感光層を
剥離操作したところ、基材上にアルミニウム薄膜からな
るポジ原稿どおりのパターンを有するポジ画像が得られ
た。A positive original having a predetermined pattern was placed on the support side of this image forming material, and a 100 mJ
After exposure at an exposure amount of /cm, the support and the photosensitive layer were peeled off, and a positive image having a pattern similar to a positive original consisting of a thin aluminum film on the base material was obtained.
実施例2
積層基板として100p厚のポリエチレンテレフタレー
トフィルムからなる基材上に真空蒸着法によって50
nm厚の酸化スズ薄膜を形成してなるものを使用した以
外は、実施例1と同様にして画像形成材料を作製した。Example 2 As a laminated substrate, 50% was deposited on a base material made of a 100p thick polyethylene terephthalate film by vacuum evaporation method.
An image forming material was produced in the same manner as in Example 1, except that a material formed by forming a nm-thick tin oxide thin film was used.
この材料を用いて実施例1と同様にして画像形成を試み
たところ、基材上に酸化スズ薄膜からなるポジ原稿どお
りのパターンを有するポジ画像が得られた。When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original consisting of a tin oxide thin film on a substrate was obtained.
実施例3
積層基板として25p厚のポリイミドフィルムからなる
基材上に真空蒸着法によって800nrn厚の銅薄膜を
形成してなるものを使用した以外は、実施例1と同様に
して画像形成材料を作製した。Example 3 An image forming material was produced in the same manner as in Example 1, except that the laminated substrate was a 25p thick polyimide film base material on which a 800nrn thick copper thin film was formed by vacuum evaporation. did.
この材料を用いて実施例1と同様にして画像形成を試み
たところ、基材上に銅薄膜からなるポジ原稿どおりのパ
ターンを有するポジ画像が得られた。When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original consisting of a copper thin film on a base material was obtained.
実施例4
ジペンタエリスリトールへキサアクリレート 8
0部ベンゾフェノン 5部4・4
′−ビスジエチルアミノベンゾフェノン 0.5部
バラメトキシフェノール 0.1部酢
酸エチル 250部
上記の組成物を混合して調製した塗布液を用いて実施例
1と同様にして感光フィルムを作製した。Example 4 Dipentaerythritol hexaacrylate 8
0 parts benzophenone 5 parts 4.4
A photosensitive film was prepared in the same manner as in Example 1 using a coating solution prepared by mixing the above compositions.
この感光フィルムと実施例1の積層基板とを用いて実施
例1と同様にして画像形成材料を作製した。An image forming material was produced in the same manner as in Example 1 using this photosensitive film and the laminated substrate of Example 1.
この材料を用いて実施例1と同様にして画像形成を試み
たところ、基材上にアルミニウム薄膜からなるポジ原稿
どおりのパターンを有するポジ画像が得られた。When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original made of a thin aluminum film on a base material was obtained.
実施例5
実施例4の感光フィルムと実施例2の積層基板とを用い
て実施例1と同様にして画像形成材料を作製した。この
材料を用いて実施例1と同様にして画像形成を試みたと
ころ、基材上に酸化スズ薄膜からなるポジ原稿どおりの
パターンを有するポジ画像が得られた。Example 5 An image forming material was produced in the same manner as in Example 1 using the photosensitive film of Example 4 and the laminated substrate of Example 2. When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original consisting of a tin oxide thin film on a substrate was obtained.
実施例6
実施例4の感光フィルムと実施例3の積層基板とを用い
て実施例1と同様にして画像形成材料を作製した。この
材料を用いて実施例1と同様にして画像形成を試みたと
ころ、基材上に銅薄膜からなるポジ原稿どおりのパター
ンを有するポジ画像が得られた。Example 6 An image forming material was produced in the same manner as in Example 1 using the photosensitive film of Example 4 and the laminated substrate of Example 3. When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original consisting of a copper thin film on a base material was obtained.
実施例7
(二愛し−ヨン社表の両市るダイヤナコルBR−75)
ベンゾフェノン 5部4・4′−ビス
ジエチルアミノベンゾフェノン 0.5部バラメトキシ
フェノール 0.1部酢酸エチル
250部
上記の組成物を混合して調製した塗布液を用いて実施例
1と同様にして感光フィルムを作製した。Example 7 (Dia Nacol BR-75 from Niai-Yonsha)
Benzophenone 5 parts 4,4'-bisdiethylaminobenzophenone 0.5 part Paramethoxyphenol 0.1 part Ethyl acetate
A photosensitive film was prepared in the same manner as in Example 1 using a coating solution prepared by mixing 250 parts of the above composition.
この感光フィルムと実施例1の積層基板とを用いて実施
例1と同様にして画像形成材料を作製した。An image forming material was produced in the same manner as in Example 1 using this photosensitive film and the laminated substrate of Example 1.
この材料を用いて実施例1と同様にして画像形成を試み
たところ、基材上にアルミニウム薄膜からなるポジ原稿
どおりのパターンを有するポジ画像が得られた。When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original made of a thin aluminum film on a base material was obtained.
実施例8
実施例7の感光フィルムと実施例2の積層基板とを用い
て実施例1と同様にして画像形成材料を作製した。この
材料を用いて実施例1と同様にして画像形成を試みたと
ころ、基材上に酸化スズ薄膜からなるポジ原稿どおりの
パターンを有するポジ画像が得られた。Example 8 An image forming material was produced in the same manner as in Example 1 using the photosensitive film of Example 7 and the laminated substrate of Example 2. When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original consisting of a tin oxide thin film on a substrate was obtained.
実施例9
実施例7の感光フィルムと実施例3の積層基板とを用い
て実施例1と同様にして画像形成材料を作製した。この
材料を用いて実施例1と同様にして画像形成を試みたと
ころ、基材上に銅薄膜からなるポジ原稿どおりのパター
ンを有するポジ画像が得られた。Example 9 An image forming material was produced in the same manner as in Example 1 using the photosensitive film of Example 7 and the laminated substrate of Example 3. When an attempt was made to form an image using this material in the same manner as in Example 1, a positive image having a pattern similar to a positive original consisting of a copper thin film on a base material was obtained.
特許出願人 日東電気工業株式会社Patent applicant: Nitto Electric Industry Co., Ltd.
Claims (2)
よびポリエチレンテレフタレートフィルムからなる支持
体がこの順に積層されてなり、上記支持体側からのパタ
ーン状露光によつて露光部における感光層と上記薄膜と
の接着力が増大し、この露光後上記支持体および感光層
を剥離操作したときに上記接着力の増大した露光部の上
記薄膜が一緒に剥離除去されて、基材上に非露光部の上
記薄膜が画像として残存する、剥離操作による画像形成
が可能な画像形成材料であつて、かつ上記感光層が溶剤
可溶性線状飽和ポリエステル樹脂、光重合性不飽和化合
物、光重合開始剤およびポリイソシアネート化合物を必
須成分として含むことを特徴とする画像形成材料。(1) A thin film of a metal or metal compound, a photosensitive layer, and a support consisting of a polyethylene terephthalate film are laminated in this order on a base material, and the photosensitive layer in the exposed area and the above are exposed in a patterned manner from the support side. The adhesive force with the thin film increases, and when the support and photosensitive layer are peeled off after this exposure, the thin film in the exposed area where the adhesive force has increased is peeled off together with the thin film, leaving an unexposed area on the base material. The above-mentioned thin film remains as an image, the image-forming material is capable of forming an image by a peeling operation, and the above-mentioned photosensitive layer contains a solvent-soluble linear saturated polyester resin, a photopolymerizable unsaturated compound, a photopolymerization initiator, and a polyester resin. An image forming material characterized by containing an isocyanate compound as an essential component.
なる積層基板と、ポリエチレンテレフタレートフィルム
からなる支持体上に溶剤可溶性線状飽和ポリエステル樹
脂、光重合性不飽和化合物、光重合開始剤およびポリイ
ソシアネート化合物を必須成分として含む組成物を塗着
して感光層を形成してなる感光フィルムとが、上記薄膜
と感光層とが接触するように加熱ラミネートされてなり
、かつ感光層中のポリイソシアネート化合物が支持体表
面の極性基との反応に関与している特許請求の範囲第(
1)項記載の画像形成材料。(2) A laminated substrate formed by forming a thin film of a metal or metal compound on a base material, and a solvent-soluble linear saturated polyester resin, a photopolymerizable unsaturated compound, and a photopolymerization initiator on a support made of a polyethylene terephthalate film. and a photosensitive film formed by applying a composition containing a polyisocyanate compound as an essential component to form a photosensitive layer, which are heat-laminated so that the thin film and the photosensitive layer are in contact with each other, and Claim No. 1, in which the polyisocyanate compound participates in the reaction with the polar group on the surface of the support
The image forming material described in section 1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31136287A JPH01152448A (en) | 1987-12-09 | 1987-12-09 | Image forming material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31136287A JPH01152448A (en) | 1987-12-09 | 1987-12-09 | Image forming material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01152448A true JPH01152448A (en) | 1989-06-14 |
Family
ID=18016251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31136287A Pending JPH01152448A (en) | 1987-12-09 | 1987-12-09 | Image forming material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01152448A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7589145B2 (en) | 2004-04-15 | 2009-09-15 | Exxonmobil Chemical Patents Inc. | Syndiotactic rich polyolefins |
US7645829B2 (en) | 2004-04-15 | 2010-01-12 | Exxonmobil Chemical Patents Inc. | Plasticized functionalized propylene copolymer adhesive composition |
US7812085B2 (en) | 2005-06-24 | 2010-10-12 | Exxonmobil Chemical Patents Inc. | Functionalized propylene copolymer adhesive composition |
JP2015219311A (en) * | 2014-05-15 | 2015-12-07 | 旭化成イーマテリアルズ株式会社 | Laminate for patterning, production method of patterned substrate, and patterned substrate |
-
1987
- 1987-12-09 JP JP31136287A patent/JPH01152448A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7589145B2 (en) | 2004-04-15 | 2009-09-15 | Exxonmobil Chemical Patents Inc. | Syndiotactic rich polyolefins |
US7645829B2 (en) | 2004-04-15 | 2010-01-12 | Exxonmobil Chemical Patents Inc. | Plasticized functionalized propylene copolymer adhesive composition |
US7812085B2 (en) | 2005-06-24 | 2010-10-12 | Exxonmobil Chemical Patents Inc. | Functionalized propylene copolymer adhesive composition |
JP2015219311A (en) * | 2014-05-15 | 2015-12-07 | 旭化成イーマテリアルズ株式会社 | Laminate for patterning, production method of patterned substrate, and patterned substrate |
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