JPH0115184Y2 - - Google Patents

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Publication number
JPH0115184Y2
JPH0115184Y2 JP1980079456U JP7945680U JPH0115184Y2 JP H0115184 Y2 JPH0115184 Y2 JP H0115184Y2 JP 1980079456 U JP1980079456 U JP 1980079456U JP 7945680 U JP7945680 U JP 7945680U JP H0115184 Y2 JPH0115184 Y2 JP H0115184Y2
Authority
JP
Japan
Prior art keywords
region
source
drain
drain contact
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980079456U
Other languages
Japanese (ja)
Other versions
JPS574246U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980079456U priority Critical patent/JPH0115184Y2/ja
Publication of JPS574246U publication Critical patent/JPS574246U/ja
Application granted granted Critical
Publication of JPH0115184Y2 publication Critical patent/JPH0115184Y2/ja
Expired legal-status Critical Current

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  • Junction Field-Effect Transistors (AREA)

Description

【考案の詳細な説明】 本考案は接合型電界効果トランジスタの改良に
関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to improvements in junction field effect transistors.

従来の接合型電界効果トランジスタは第1図に
示す如く、ゲート領域1によつて囲まれ且つゲー
ト領域1下のチヤンネル領域2をはさんでソース
およびドレイン領域3,4を設け、ソースおよび
ドレイン領域3,4表面にはチヤンネル領域2に
並行して方形状のソースおよびドレインコンタク
ト領域5,6を設けて構成していた。
As shown in FIG. 1, a conventional junction field effect transistor includes source and drain regions 3 and 4 surrounded by a gate region 1 and sandwiching a channel region 2 below the gate region 1. Rectangular source and drain contact regions 5 and 6 were provided on surfaces 3 and 4 in parallel with the channel region 2.

斯る接合型電界効果トランジスタではソースお
よびドレインコンタクト領域5,6をソースおよ
びドレイン領域3,4の端部すなわちコーナー部
まで同じ長さに設けており且つゲート領域1まで
のバスもほぼ同じ長さになる様に設計していた。
しかしながら斯るパターンは低電圧で用いる場合
は何ら問題を発生しないが、高耐圧構造としては
全く不適である。即ちドレインゲート間は逆バイ
アスされて使用されるためドレイン領域4のドレ
インコンタクト領域6の端部すなわちコーナー部
で電界が集中してなだれ降伏してしまうのであ
る。
In such a junction field effect transistor, the source and drain contact regions 5 and 6 are provided with the same length up to the ends, or corners, of the source and drain regions 3 and 4, and the busses to the gate region 1 are also provided with approximately the same length. It was designed to be.
However, although such a pattern does not cause any problems when used at a low voltage, it is completely unsuitable for a high voltage structure. That is, since the region between the drain and gate is used with a reverse bias, the electric field is concentrated at the end or corner of the drain contact region 6 of the drain region 4, resulting in avalanche breakdown.

本考案は斯点に鑑みてなされたものであり、第
2図および第3図を参照して本考案の一実施例を
詳述する。
The present invention has been made in view of this point, and one embodiment of the present invention will be described in detail with reference to FIGS. 2 and 3.

本考案に依る接合型電界効果トランジスタは第
2図に示す様にゲート領域11を囲み且つゲート
領域11下のチヤンネル領域12をはさんでソー
スおよびドレイン領域13,14を設け、ソース
およびドレイン領域13,14表面に方形状のソ
ースおよびドレインコンタクト領域15,16を
設け、ドレインコンタクト領域16の端部すなわ
ちコーナー部とゲート領域11の距離をチヤンネ
ル領域12と対向する部分とゲート領域11のバ
スaよりも長いバスbにして前記ドレインコンタ
クト16のコーナー部と前記ゲート領域11との
距離を離間させるように構成される。
As shown in FIG. 2, the junction field effect transistor according to the present invention is provided with source and drain regions 13 and 14 surrounding a gate region 11 and sandwiching a channel region 12 below the gate region 11. , 14 are provided with rectangular source and drain contact regions 15 and 16, and the distance between the end, that is, the corner, of the drain contact region 16 and the gate region 11 is set from the part facing the channel region 12 and the bus a of the gate region 11. The bus b is also long so that the corner portion of the drain contact 16 and the gate region 11 are spaced apart from each other.

本考案者はゲート領域11の長さ3μm、ゲート
領域11下のチヤンネル領域の比抵抗8Ωcm、下
部ゲートとなる基板の比抵抗30Ωcmで構成した接
合型電界効果トランジスタに於いてチヤンネル領
域12に対向するドレインコンタクト領域16の
バスaを10μmに設定してドレインコンタクト領
域16の端部すなわちコーナー部のバスbを可変
にして耐圧の測定を行つた結果第3図に示す実験
結果を得た。第3図から明らかな様にバスbがバ
スaより小さいとき耐圧は大巾に低下しており、
例えばバスaとバスbを等しく設計しても耐圧は
170Vしか取れない。これに対してバスbを
150μmに設計すると耐圧は240Vまで向上でき、
それ以上バスbを長くしても耐圧は向上しないこ
とが分る。
The present inventor proposed a junction field effect transistor in which the length of the gate region 11 is 3 μm, the specific resistance of the channel region under the gate region 11 is 8 Ωcm, and the specific resistance of the substrate serving as the lower gate is 30 Ωcm. The withstand voltage was measured by setting the bus a of the drain contact region 16 to 10 μm and varying the bus b at the end or corner portion of the drain contact region 16. As a result, the experimental results shown in FIG. 3 were obtained. As is clear from Figure 3, when bus b is smaller than bus a, the withstand voltage is greatly reduced.
For example, even if bus a and bus b are designed equally, the withstand voltage will be
I can only get 170V. In contrast, bus b
If designed to 150μm, the withstand voltage can be improved to 240V,
It can be seen that even if the bus b is made longer than that, the breakdown voltage does not improve.

以上に詳述した如く本考案に依れば、電界の集
中しやすいドレインコンタクト領域16端部すな
わちコーナー部のゲート領域11までのバスbを
長くするだけで耐圧を容易に向上できる有益なも
のである。
As described in detail above, the present invention is advantageous in that the withstand voltage can be easily improved by simply lengthening the bus b to the gate region 11 at the end of the drain contact region 16 where electric fields tend to concentrate, that is, at the corner. be.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来例を説明する上面図、第2図は本
考案を説明する上面図、第3図は本考案の実験結
果を説明する特性図である。 11はゲート領域、12はチヤンネル領域、1
3,14はソースおよびドレイン領域、15,1
6はソースおよびドレインコンタクト領域であ
る。
FIG. 1 is a top view illustrating a conventional example, FIG. 2 is a top view illustrating the present invention, and FIG. 3 is a characteristic diagram illustrating experimental results of the present invention. 11 is a gate region, 12 is a channel region, 1
3, 14 are source and drain regions, 15, 1
6 is a source and drain contact region.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ゲート領域によつて囲まれ且つ該ゲート領域下
のチヤンネル領域をはさんで設けられたソースド
レイン領域と該ソースドレイン領域表面に設けた
長方形状のソースドレインコンタクト領域とを具
備する接合型電界効果トランジスタに於いて、前
記チヤンネル領域および前記ソースコンタクト領
域と対向する前記ドレインコンタクト領域の長辺
と前記ゲート領域との離間距離より前記ドレイン
コンタクト領域の短辺と前記ゲート領域との離間
距離を大きくしたことを特徴とする接合型電界効
果トランジスタ。
A junction field effect transistor comprising a source/drain region surrounded by a gate region and provided across a channel region below the gate region, and a rectangular source/drain contact region provided on the surface of the source/drain region. In the method, a distance between a short side of the drain contact region and the gate region is made larger than a distance between a long side of the drain contact region, which faces the channel region and the source contact region, and the gate region. A junction field effect transistor characterized by:
JP1980079456U 1980-06-06 1980-06-06 Expired JPH0115184Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980079456U JPH0115184Y2 (en) 1980-06-06 1980-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980079456U JPH0115184Y2 (en) 1980-06-06 1980-06-06

Publications (2)

Publication Number Publication Date
JPS574246U JPS574246U (en) 1982-01-09
JPH0115184Y2 true JPH0115184Y2 (en) 1989-05-08

Family

ID=29441938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980079456U Expired JPH0115184Y2 (en) 1980-06-06 1980-06-06

Country Status (1)

Country Link
JP (1) JPH0115184Y2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924079A (en) * 1972-06-23 1974-03-04
JPS5367371A (en) * 1976-11-29 1978-06-15 Sony Corp Semiconductor device
JPS548476A (en) * 1977-06-22 1979-01-22 Seiko Instr & Electronics Ltd Semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924079A (en) * 1972-06-23 1974-03-04
JPS5367371A (en) * 1976-11-29 1978-06-15 Sony Corp Semiconductor device
JPS548476A (en) * 1977-06-22 1979-01-22 Seiko Instr & Electronics Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS574246U (en) 1982-01-09

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