JPH0115145B2 - - Google Patents

Info

Publication number
JPH0115145B2
JPH0115145B2 JP55120765A JP12076580A JPH0115145B2 JP H0115145 B2 JPH0115145 B2 JP H0115145B2 JP 55120765 A JP55120765 A JP 55120765A JP 12076580 A JP12076580 A JP 12076580A JP H0115145 B2 JPH0115145 B2 JP H0115145B2
Authority
JP
Japan
Prior art keywords
electrode
window
etching
region
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55120765A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5745256A (en
Inventor
Tadashi Kirisako
Ryoji Abe
Yoshinobu Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55120765A priority Critical patent/JPS5745256A/ja
Publication of JPS5745256A publication Critical patent/JPS5745256A/ja
Publication of JPH0115145B2 publication Critical patent/JPH0115145B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/069—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • Bipolar Integrated Circuits (AREA)
JP55120765A 1980-09-01 1980-09-01 Manufacture of semiconductor device Granted JPS5745256A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55120765A JPS5745256A (en) 1980-09-01 1980-09-01 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55120765A JPS5745256A (en) 1980-09-01 1980-09-01 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5745256A JPS5745256A (en) 1982-03-15
JPH0115145B2 true JPH0115145B2 (index.php) 1989-03-15

Family

ID=14794437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55120765A Granted JPS5745256A (en) 1980-09-01 1980-09-01 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5745256A (index.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2590409B1 (fr) * 1985-11-15 1987-12-11 Commissariat Energie Atomique Procede de fabrication d'un transistor en couches minces a grille auto-alignee par rapport au drain et a la source de celui-ci et transistor obtenu par le procede
US9097269B2 (en) 2012-06-04 2015-08-04 Fisher Controls International, Llc Bracket assemblies for use with actuators
US9945701B2 (en) 2015-07-17 2018-04-17 Fisher Controls International Llc Actuator bracket having a sensor

Also Published As

Publication number Publication date
JPS5745256A (en) 1982-03-15

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