JPH0115145B2 - - Google Patents
Info
- Publication number
- JPH0115145B2 JPH0115145B2 JP12076580A JP12076580A JPH0115145B2 JP H0115145 B2 JPH0115145 B2 JP H0115145B2 JP 12076580 A JP12076580 A JP 12076580A JP 12076580 A JP12076580 A JP 12076580A JP H0115145 B2 JPH0115145 B2 JP H0115145B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- window
- etching
- region
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076580A JPS5745256A (en) | 1980-09-01 | 1980-09-01 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12076580A JPS5745256A (en) | 1980-09-01 | 1980-09-01 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5745256A JPS5745256A (en) | 1982-03-15 |
| JPH0115145B2 true JPH0115145B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-03-15 |
Family
ID=14794437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12076580A Granted JPS5745256A (en) | 1980-09-01 | 1980-09-01 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5745256A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2590409B1 (fr) * | 1985-11-15 | 1987-12-11 | Commissariat Energie Atomique | Procede de fabrication d'un transistor en couches minces a grille auto-alignee par rapport au drain et a la source de celui-ci et transistor obtenu par le procede |
| US9097269B2 (en) | 2012-06-04 | 2015-08-04 | Fisher Controls International, Llc | Bracket assemblies for use with actuators |
| US9945701B2 (en) | 2015-07-17 | 2018-04-17 | Fisher Controls International Llc | Actuator bracket having a sensor |
-
1980
- 1980-09-01 JP JP12076580A patent/JPS5745256A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5745256A (en) | 1982-03-15 |