JPH0114664B2 - - Google Patents
Info
- Publication number
- JPH0114664B2 JPH0114664B2 JP55088287A JP8828780A JPH0114664B2 JP H0114664 B2 JPH0114664 B2 JP H0114664B2 JP 55088287 A JP55088287 A JP 55088287A JP 8828780 A JP8828780 A JP 8828780A JP H0114664 B2 JPH0114664 B2 JP H0114664B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- solid
- local
- analysis
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 51
- 239000007787 solid Substances 0.000 claims description 29
- 238000010894 electron beam technology Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 16
- 238000004868 gas analysis Methods 0.000 claims description 14
- 230000005284 excitation Effects 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 7
- 230000000638 stimulation Effects 0.000 claims description 5
- 238000004949 mass spectrometry Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 34
- 239000000463 material Substances 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000004125 X-ray microanalysis Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000010206 sensitivity analysis Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8828780A JPS5713660A (en) | 1980-06-27 | 1980-06-27 | Method of analysing solid local gas and its device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8828780A JPS5713660A (en) | 1980-06-27 | 1980-06-27 | Method of analysing solid local gas and its device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5713660A JPS5713660A (en) | 1982-01-23 |
| JPH0114664B2 true JPH0114664B2 (ru) | 1989-03-13 |
Family
ID=13938686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8828780A Granted JPS5713660A (en) | 1980-06-27 | 1980-06-27 | Method of analysing solid local gas and its device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5713660A (ru) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2695850B2 (ja) * | 1987-07-20 | 1998-01-14 | ニチモウ株式会社 | 無結節網 |
| US6374531B1 (en) | 1995-10-13 | 2002-04-23 | Ottr Ultra-Low Drag, Ltd. | Trawl system cell design and methods |
| US5742050A (en) * | 1996-09-30 | 1998-04-21 | Aviv Amirav | Method and apparatus for sample introduction into a mass spectrometer for improving a sample analysis |
| EP0977479B1 (en) | 1997-04-14 | 2003-09-10 | OTTER Ultra-Low-Drag, Ltd. | Improved cell design for a trawl system and methods |
| JPH11173962A (ja) * | 1997-12-15 | 1999-07-02 | Mitsubishi Electric Corp | 試料表面の有機物分析装置及び有機物分析方法 |
| WO1999039572A1 (en) | 1998-02-10 | 1999-08-12 | Martrawl, Inc. | Bi-directional, manufacturable, lift-generating mesh bar |
| JP2021055996A (ja) * | 2017-12-13 | 2021-04-08 | 株式会社日立ハイテク | 電子線照射装置、分析システム |
-
1980
- 1980-06-27 JP JP8828780A patent/JPS5713660A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5713660A (en) | 1982-01-23 |
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