JPH01141759U - - Google Patents

Info

Publication number
JPH01141759U
JPH01141759U JP3571788U JP3571788U JPH01141759U JP H01141759 U JPH01141759 U JP H01141759U JP 3571788 U JP3571788 U JP 3571788U JP 3571788 U JP3571788 U JP 3571788U JP H01141759 U JPH01141759 U JP H01141759U
Authority
JP
Japan
Prior art keywords
ion source
source chamber
ion
microwaves
magnetic coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3571788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735291Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988035717U priority Critical patent/JPH0735291Y2/ja
Publication of JPH01141759U publication Critical patent/JPH01141759U/ja
Application granted granted Critical
Publication of JPH0735291Y2 publication Critical patent/JPH0735291Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1988035717U 1988-03-16 1988-03-16 イオン源 Expired - Lifetime JPH0735291Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988035717U JPH0735291Y2 (ja) 1988-03-16 1988-03-16 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988035717U JPH0735291Y2 (ja) 1988-03-16 1988-03-16 イオン源

Publications (2)

Publication Number Publication Date
JPH01141759U true JPH01141759U (enExample) 1989-09-28
JPH0735291Y2 JPH0735291Y2 (ja) 1995-08-09

Family

ID=31262360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988035717U Expired - Lifetime JPH0735291Y2 (ja) 1988-03-16 1988-03-16 イオン源

Country Status (1)

Country Link
JP (1) JPH0735291Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3917061B2 (ja) * 2002-11-14 2007-05-23 株式会社昭和真空 圧電素子の周波数調整装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60264032A (ja) * 1984-06-11 1985-12-27 Nippon Telegr & Teleph Corp <Ntt> マイクロ波イオン源
JPS62290054A (ja) * 1986-06-09 1987-12-16 Mitsubishi Electric Corp マイクロ波によるガスのイオン化方法およびイオン源装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60264032A (ja) * 1984-06-11 1985-12-27 Nippon Telegr & Teleph Corp <Ntt> マイクロ波イオン源
JPS62290054A (ja) * 1986-06-09 1987-12-16 Mitsubishi Electric Corp マイクロ波によるガスのイオン化方法およびイオン源装置

Also Published As

Publication number Publication date
JPH0735291Y2 (ja) 1995-08-09

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