JPH0292646U - - Google Patents

Info

Publication number
JPH0292646U
JPH0292646U JP149889U JP149889U JPH0292646U JP H0292646 U JPH0292646 U JP H0292646U JP 149889 U JP149889 U JP 149889U JP 149889 U JP149889 U JP 149889U JP H0292646 U JPH0292646 U JP H0292646U
Authority
JP
Japan
Prior art keywords
ion source
magnetic field
microwave
source chamber
microwaves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP149889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP149889U priority Critical patent/JPH0292646U/ja
Publication of JPH0292646U publication Critical patent/JPH0292646U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP149889U 1989-01-10 1989-01-10 Pending JPH0292646U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP149889U JPH0292646U (enExample) 1989-01-10 1989-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP149889U JPH0292646U (enExample) 1989-01-10 1989-01-10

Publications (1)

Publication Number Publication Date
JPH0292646U true JPH0292646U (enExample) 1990-07-23

Family

ID=31201435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP149889U Pending JPH0292646U (enExample) 1989-01-10 1989-01-10

Country Status (1)

Country Link
JP (1) JPH0292646U (enExample)

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