JPH01134782U - - Google Patents
Info
- Publication number
- JPH01134782U JPH01134782U JP3085488U JP3085488U JPH01134782U JP H01134782 U JPH01134782 U JP H01134782U JP 3085488 U JP3085488 U JP 3085488U JP 3085488 U JP3085488 U JP 3085488U JP H01134782 U JPH01134782 U JP H01134782U
- Authority
- JP
- Japan
- Prior art keywords
- pump
- pneumatic valve
- purge gas
- high vacuum
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案装置の一実施例の構成を示す説
明図、第２図は従来装置の一例の構成を示す説明
図である。 １……真空容器、２……高真空排気ポンプ、３
……ゲート弁、４……第１空圧弁、５……第２空
圧弁、６……ガス溜め容器、７……第３空圧弁。
明図、第２図は従来装置の一例の構成を示す説明
図である。 １……真空容器、２……高真空排気ポンプ、３
……ゲート弁、４……第１空圧弁、５……第２空
圧弁、６……ガス溜め容器、７……第３空圧弁。
Claims (1)
- 真空容器１内を排気する高真空排気ポンプ２と
、このポンプ２の吸込口側と吐出口側にそれぞれ
ゲート弁３と第１空圧弁４を挿設し、当該ポンプ
２の吸込口側にパージガス導入用の第２空圧弁５
を連結せしめてなる高真空排気ポンプのパージガ
ス導入装置において、上記第２空圧弁５の流入側
にガス溜め容器６を設け、この容器６の流入側に
パージガスを導入する第３空圧弁７を挿設せしめ
てなる高真空排気ポンプのパージガス導入装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3085488U JPH01134782U (ja) | 1988-03-07 | 1988-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3085488U JPH01134782U (ja) | 1988-03-07 | 1988-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01134782U true JPH01134782U (ja) | 1989-09-14 |
Family
ID=31256277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3085488U Pending JPH01134782U (ja) | 1988-03-07 | 1988-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134782U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02140971U (ja) * | 1989-04-20 | 1990-11-26 |
-
1988
- 1988-03-07 JP JP3085488U patent/JPH01134782U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02140971U (ja) * | 1989-04-20 | 1990-11-26 |