JPH01134363A - 露光装置を作動させる方法およびこの方法を遂行するための露光装置 - Google Patents

露光装置を作動させる方法およびこの方法を遂行するための露光装置

Info

Publication number
JPH01134363A
JPH01134363A JP63256099A JP25609988A JPH01134363A JP H01134363 A JPH01134363 A JP H01134363A JP 63256099 A JP63256099 A JP 63256099A JP 25609988 A JP25609988 A JP 25609988A JP H01134363 A JPH01134363 A JP H01134363A
Authority
JP
Japan
Prior art keywords
housing
heating
tubes
fluorescent lamp
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63256099A
Other languages
English (en)
Japanese (ja)
Inventor
Peter Ulrich
ペーター・ウルリヒ
Hans P Weihe
ハンス・ペーター・ヴアイエ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JPH01134363A publication Critical patent/JPH01134363A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/16—Illumination arrangements, e.g. positioning of lamps, positioning of reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP63256099A 1987-10-14 1988-10-13 露光装置を作動させる方法およびこの方法を遂行するための露光装置 Pending JPH01134363A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873734767 DE3734767A1 (de) 1987-10-14 1987-10-14 Verfahren zum betrieb eines belichtungsgeraets und belichtungsgeraet zur durchfuehrung dieses verfahrens
DE3734767.5 1987-10-14

Publications (1)

Publication Number Publication Date
JPH01134363A true JPH01134363A (ja) 1989-05-26

Family

ID=6338310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63256099A Pending JPH01134363A (ja) 1987-10-14 1988-10-13 露光装置を作動させる方法およびこの方法を遂行するための露光装置

Country Status (5)

Country Link
US (1) US4922078A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0312002B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH01134363A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3734767A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DK (1) DK570188A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5386268A (en) * 1993-07-26 1995-01-31 E. I. Du Pont De Nemours And Company Exposure unit and method for exposing photosensitive materials
TWI245576B (en) * 2004-10-22 2005-12-11 Au Optronics Corp Mercury-heating device and method of manufacturing the same
US7794105B2 (en) * 2007-01-09 2010-09-14 Percival Scientific, Inc. Temperature controlled light fixture for environmental chamber
US7691550B2 (en) * 2007-06-20 2010-04-06 E.I. Du Pont De Nemours And Company Method for making a relief printing form
CN101980844B (zh) * 2008-04-01 2013-10-16 诺瓦提斯公司 通过荧光灯温度监控的紫外线输出稳定性
DE102008002727B4 (de) 2008-06-27 2020-12-17 Brita Gmbh Vorrichtung zur Behandlung von Wasser, insbesondere Filtervorrichtung, und Kartusche
DE102008040335B4 (de) 2008-07-10 2013-05-08 Brita Gmbh Vorrichtung zur Entkeimung von Wasser und Verwendung derselben
DE102008044294A1 (de) * 2008-12-02 2010-06-10 Brita Gmbh Quecksilberdampflampe, Verfahren zum Entkeimen von Flüssigkeiten und Flüssigkeitsentkeimungsvorrichtung
US8468940B2 (en) * 2009-06-19 2013-06-25 E. I. Du Pont De Nemours And Company Apparatus and process for exposing a printing form having a cylindrical support
JP5875759B2 (ja) * 2010-10-14 2016-03-02 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 熱処理方法および熱処理装置
TWD148182S1 (zh) 2011-04-01 2012-07-11 布利塔有限公司 紫外線輻射裝置
US9372407B2 (en) 2013-04-18 2016-06-21 E I Du Pont De Nemours And Company Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764554A (en) * 1980-10-09 1982-04-19 Toshiba Corp Lighting device for metal halide lamp for photochemical reaction
JPS5814165A (ja) * 1981-07-17 1983-01-26 Canon Inc 像形成装置
JPS5878176A (ja) * 1981-11-04 1983-05-11 Seiko Epson Corp 印写装置
JPS5878175A (ja) * 1981-11-04 1983-05-11 Seiko Epson Corp 印写装置
JPS58168044A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 原稿読取装置
JPS6365037B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1982-08-23 1988-12-14

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2581959A (en) * 1950-11-13 1952-01-08 Adolph F Koehler Fluorescent lamp
SU122549A1 (ru) * 1959-02-19 1959-11-30 Б.И. Королев Газоразр дна лампа
FR1352182A (fr) * 1962-12-07 1964-02-14 Thomson Houston Comp Francaise Perfectionnements aux caméras de télévision
GB1122629A (en) * 1964-10-14 1968-08-07 Rank Xerox Ltd Illumination control system
US3457454A (en) * 1966-08-01 1969-07-22 Ultra Violet Products Inc Stabilized light source for operation at substantially constant temperature and intensity
FR1507210A (fr) * 1966-10-14 1967-12-29 Pat & Visseaux Claude Dispositif pour reproduire un document en impressionnant un support photosensible par un rayonnement
FR1548668A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1967-10-27 1968-12-06
US3779640A (en) * 1972-10-13 1973-12-18 Xerox Corp Heating apparatus for scan lamp
JPS50106475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-12-21 1975-08-21
DE2527299A1 (de) * 1975-06-19 1976-12-30 Technigraf Gmbh Kopierlampe
US4140385A (en) * 1976-03-22 1979-02-20 Xerox Corporation Low pressure metal or metal halide lamps for photocopying applications
US4291118A (en) * 1979-12-26 1981-09-22 W. R. Grace & Co. Relief imaging liquids
DE3110512A1 (de) * 1981-03-18 1982-10-07 Jürg 8005 Zürich Nigg "heizvorrichtung fuer metalldampflampen zum erzielen und aufrechterhalten eines bereitschaftszustandes"

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764554A (en) * 1980-10-09 1982-04-19 Toshiba Corp Lighting device for metal halide lamp for photochemical reaction
JPS5814165A (ja) * 1981-07-17 1983-01-26 Canon Inc 像形成装置
JPS5878176A (ja) * 1981-11-04 1983-05-11 Seiko Epson Corp 印写装置
JPS5878175A (ja) * 1981-11-04 1983-05-11 Seiko Epson Corp 印写装置
JPS58168044A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 原稿読取装置
JPS6365037B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1982-08-23 1988-12-14

Also Published As

Publication number Publication date
DE3734767A1 (de) 1989-04-27
US4922078A (en) 1990-05-01
DK570188A (da) 1989-04-15
EP0312002A3 (en) 1990-09-05
EP0312002B1 (en) 1995-03-01
EP0312002A2 (en) 1989-04-19
DK570188D0 (da) 1988-10-13
DE3734767C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-30

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