JPH01133346A - 半導体集積回路の製造方法 - Google Patents

半導体集積回路の製造方法

Info

Publication number
JPH01133346A
JPH01133346A JP29240887A JP29240887A JPH01133346A JP H01133346 A JPH01133346 A JP H01133346A JP 29240887 A JP29240887 A JP 29240887A JP 29240887 A JP29240887 A JP 29240887A JP H01133346 A JPH01133346 A JP H01133346A
Authority
JP
Japan
Prior art keywords
region
lower electrode
forming
conductivity type
electrode region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29240887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0583193B2 (enExample
Inventor
Nobuyuki Sekikawa
信之 関川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP29240887A priority Critical patent/JPH01133346A/ja
Publication of JPH01133346A publication Critical patent/JPH01133346A/ja
Publication of JPH0583193B2 publication Critical patent/JPH0583193B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
JP29240887A 1987-11-19 1987-11-19 半導体集積回路の製造方法 Granted JPH01133346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29240887A JPH01133346A (ja) 1987-11-19 1987-11-19 半導体集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29240887A JPH01133346A (ja) 1987-11-19 1987-11-19 半導体集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPH01133346A true JPH01133346A (ja) 1989-05-25
JPH0583193B2 JPH0583193B2 (enExample) 1993-11-25

Family

ID=17781397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29240887A Granted JPH01133346A (ja) 1987-11-19 1987-11-19 半導体集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPH01133346A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109388A (en) * 1978-02-15 1979-08-27 Matsushita Electric Ind Co Ltd Semiconductor integrated circuit
JPS57128953A (en) * 1981-02-02 1982-08-10 Matsushita Electric Ind Co Ltd Manufacture of semiconductor integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109388A (en) * 1978-02-15 1979-08-27 Matsushita Electric Ind Co Ltd Semiconductor integrated circuit
JPS57128953A (en) * 1981-02-02 1982-08-10 Matsushita Electric Ind Co Ltd Manufacture of semiconductor integrated circuit

Also Published As

Publication number Publication date
JPH0583193B2 (enExample) 1993-11-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term