JPH01129432A - Integrated circuit - Google Patents

Abstract

PURPOSE:To conduct positioning to terminals for all probes accurately and easily when an LSI is tested by forming positioning terminals, which are partly connected mutually through a wiring pattern in an integrated circuit chip, apart from normal input/output terminals. CONSTITUTION:Positioning terminals 13-16 at the four corners of an LSI chip 10 and wiring patterns 131, 132 in the LSI chip 10 connecting the positioning terminals 13 and 14 and 15 and 16 are shaped. When an LSI is tested electrically, an open monitor 17 is connected between positioning probes 121 and 124, and positioning probes 122 and 123 are connected by an external wiring 18. When the positioning probes 121-124 are positioned accurately to all the positioning terminals 13-16, a closed loop of the positioning probe 121 the inside of the LSI the positioning probe 124 is constituted through the open monitor 17, and a low resistance value between the positioning probes 121 and 124 is acquired when the probes are positioned precisely when a resistance value between the probes 121 and 124 is measured. When one or more of the positioning probes 121-124 are displaced from the positioning terminals 13-16, a resistance value in the open monitor 17 displays an extremely large value or infinity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to integrated circuits, and particularly to a structure for positioning a probe used when testing an integrated circuit at the wafer stage and an LSI terminal.

[Conventional technology]

When electrically testing integrated circuit chips (hereinafter referred to as LSI) at the wafer stage, a so-called LSI tester is usually used. An electrical test with an LSI tester is performed by supplying a signal and power according to the test to the signal terminal and power supply terminal of the LSI from the probe of the tester.

Conventionally, when testing this type of LSI, it has been necessary to visually position the probe and the center of the LSI terminals for all terminals of the LSI prior to the test.

[Problem that the invention seeks to solve]

The above-mentioned conventional LSI has the disadvantage that it requires a great deal of effort to accurately position the probe and the LSI terminal during electrical testing.

SUMMARY OF THE INVENTION An object of the present invention is to provide an integrated circuit that eliminates the above-mentioned problems.

[Differences between the invention and the prior art]

In contrast to the above-mentioned conventional LSI, the present invention provides the following advantages when performing probing with a probe during electrical testing of integrated circuits.
The difference is that whether or not the probes are completely connected is externally monitored electrically.

[Means for solving problems]

The present invention is an integrated circuit characterized in that it has positioning terminals, some of which are connected to each other via wiring patterns within the integrated circuit chip, separately from normal input/output terminals and power supply terminals.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a diagram showing an embodiment of the present invention. In the figure,
10 is an LSI chip, 11 is a terminal that supplies input/output signals and power, 12 is a probe that supplies test signals from test equipment such as an LSI tester to terminal 11, and 13 to 16 are LS
Positioning terminals provided at the four corners of the I-chip 10,
121 to 124 are positioning probes corresponding to the positioning terminals 13 to 16; 131 to 132 are the positioning terminals 1;
The wiring patterns within the LSI chip 10 connecting 3 and 14 and 15 and 16 are shown. When electrically testing an LSI, an open monitor 17 is connected between the positioning probes 121 and 124, and the positioning probes 122 and 123 are connected by an external wiring 18.

Next, the operation of the present invention will be explained.

In Fig. 1, the positioning probes 121 to 124 are connected to the positioning terminal 1.
3 to 16 are all accurately positioned. In this case, positioning probe 121 → wiring pattern 131 inside LSI → positioning probe 122 → external wiring 18
→Positioning probe 123→Wiring pattern 132 inside LSI
→A closed loop called the positioning probe 124 is configured via the open monitor 17.

If the open monitor 17 measures the resistance value between the positioning probes 121 and 124, it will show a low resistance value when the probes are accurately positioned as shown in FIG.

If one or more of the positioning probes 121 to 124 is detached from the positioning terminals 13 to 16, the positioning probe 12
A portion between 1 and 124 becomes open, and the resistance value on the open monitor 17 shows a very large value or infinity.

〔Effect of the invention〕

As explained above, the present invention enables the positioning probe to be externally positioned at the positioning terminal provided separately from the input/output and power supply terminals when positioning the test probe at the input/output terminal and the power supply terminal during LSI testing. Accurate alignment using a monitor has the effect of accurately and easily positioning the entire probe relative to the terminal.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an embodiment of the present invention.

Claims (1)

[Claims] (1) An integrated circuit characterized by having positioning terminals, some of which are connected to each other via wiring patterns within the integrated circuit chip, separate from normal input/output terminals and power supply terminals.