JPH01125532U - - Google Patents

Info

Publication number
JPH01125532U
JPH01125532U JP2201288U JP2201288U JPH01125532U JP H01125532 U JPH01125532 U JP H01125532U JP 2201288 U JP2201288 U JP 2201288U JP 2201288 U JP2201288 U JP 2201288U JP H01125532 U JPH01125532 U JP H01125532U
Authority
JP
Japan
Prior art keywords
plasma
electrodes
impurity
reaction tank
windable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2201288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2201288U priority Critical patent/JPH01125532U/ja
Publication of JPH01125532U publication Critical patent/JPH01125532U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP2201288U 1988-02-22 1988-02-22 Pending JPH01125532U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2201288U JPH01125532U (cs) 1988-02-22 1988-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2201288U JPH01125532U (cs) 1988-02-22 1988-02-22

Publications (1)

Publication Number Publication Date
JPH01125532U true JPH01125532U (cs) 1989-08-28

Family

ID=31239747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2201288U Pending JPH01125532U (cs) 1988-02-22 1988-02-22

Country Status (1)

Country Link
JP (1) JPH01125532U (cs)

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