JPH01125363U - - Google Patents
Info
- Publication number
- JPH01125363U JPH01125363U JP2201588U JP2201588U JPH01125363U JP H01125363 U JPH01125363 U JP H01125363U JP 2201588 U JP2201588 U JP 2201588U JP 2201588 U JP2201588 U JP 2201588U JP H01125363 U JPH01125363 U JP H01125363U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electrodes
- windable
- rollers
- created
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2201588U JPH01125363U (cs) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2201588U JPH01125363U (cs) | 1988-02-22 | 1988-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125363U true JPH01125363U (cs) | 1989-08-25 |
Family
ID=31239753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2201588U Pending JPH01125363U (cs) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125363U (cs) |
-
1988
- 1988-02-22 JP JP2201588U patent/JPH01125363U/ja active Pending
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