JPH01125369U - - Google Patents

Info

Publication number
JPH01125369U
JPH01125369U JP1987288U JP1987288U JPH01125369U JP H01125369 U JPH01125369 U JP H01125369U JP 1987288 U JP1987288 U JP 1987288U JP 1987288 U JP1987288 U JP 1987288U JP H01125369 U JPH01125369 U JP H01125369U
Authority
JP
Japan
Prior art keywords
chamber
reaction tube
exhaust device
gate valve
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987288U priority Critical patent/JPH01125369U/ja
Publication of JPH01125369U publication Critical patent/JPH01125369U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987288U 1988-02-17 1988-02-17 Pending JPH01125369U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987288U JPH01125369U (enrdf_load_stackoverflow) 1988-02-17 1988-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987288U JPH01125369U (enrdf_load_stackoverflow) 1988-02-17 1988-02-17

Publications (1)

Publication Number Publication Date
JPH01125369U true JPH01125369U (enrdf_load_stackoverflow) 1989-08-25

Family

ID=31235767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987288U Pending JPH01125369U (enrdf_load_stackoverflow) 1988-02-17 1988-02-17

Country Status (1)

Country Link
JP (1) JPH01125369U (enrdf_load_stackoverflow)

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