JPH01177274U - - Google Patents
Info
- Publication number
- JPH01177274U JPH01177274U JP7329288U JP7329288U JPH01177274U JP H01177274 U JPH01177274 U JP H01177274U JP 7329288 U JP7329288 U JP 7329288U JP 7329288 U JP7329288 U JP 7329288U JP H01177274 U JPH01177274 U JP H01177274U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- compartment
- gate valve
- operating rod
- argon gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002019 doping agent Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329288U JPH01177274U (enrdf_load_stackoverflow) | 1988-06-01 | 1988-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329288U JPH01177274U (enrdf_load_stackoverflow) | 1988-06-01 | 1988-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01177274U true JPH01177274U (enrdf_load_stackoverflow) | 1989-12-18 |
Family
ID=31298437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7329288U Pending JPH01177274U (enrdf_load_stackoverflow) | 1988-06-01 | 1988-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01177274U (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341792A (en) * | 1976-09-29 | 1978-04-15 | Hitachi Ltd | Repeating terminal device |
| JPS5953783B2 (ja) * | 1978-02-28 | 1984-12-26 | 松下電工株式会社 | 安定回転型多極同期電動機 |
-
1988
- 1988-06-01 JP JP7329288U patent/JPH01177274U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5341792A (en) * | 1976-09-29 | 1978-04-15 | Hitachi Ltd | Repeating terminal device |
| JPS5953783B2 (ja) * | 1978-02-28 | 1984-12-26 | 松下電工株式会社 | 安定回転型多極同期電動機 |