JPH01177275U - - Google Patents
Info
- Publication number
- JPH01177275U JPH01177275U JP7329388U JP7329388U JPH01177275U JP H01177275 U JPH01177275 U JP H01177275U JP 7329388 U JP7329388 U JP 7329388U JP 7329388 U JP7329388 U JP 7329388U JP H01177275 U JPH01177275 U JP H01177275U
- Authority
- JP
- Japan
- Prior art keywords
- dope
- chamber
- supply device
- compartment
- argon gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002019 doping agent Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329388U JPH01177275U (enrdf_load_stackoverflow) | 1988-06-01 | 1988-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329388U JPH01177275U (enrdf_load_stackoverflow) | 1988-06-01 | 1988-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01177275U true JPH01177275U (enrdf_load_stackoverflow) | 1989-12-18 |
Family
ID=31298438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7329388U Pending JPH01177275U (enrdf_load_stackoverflow) | 1988-06-01 | 1988-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01177275U (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013129551A (ja) * | 2011-12-20 | 2013-07-04 | Shin Etsu Handotai Co Ltd | 単結晶製造装置及び単結晶製造方法 |
| WO2017031328A1 (en) * | 2015-08-20 | 2017-02-23 | Sunedison Semiconductor Limited | Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber |
-
1988
- 1988-06-01 JP JP7329388U patent/JPH01177275U/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013129551A (ja) * | 2011-12-20 | 2013-07-04 | Shin Etsu Handotai Co Ltd | 単結晶製造装置及び単結晶製造方法 |
| WO2017031328A1 (en) * | 2015-08-20 | 2017-02-23 | Sunedison Semiconductor Limited | Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber |
| US10273596B2 (en) | 2015-08-20 | 2019-04-30 | Globalwafers Co., Ltd. | Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber |
| US10577717B2 (en) | 2015-08-20 | 2020-03-03 | Globalwafers Co., Ltd. | Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber |
| US11085126B2 (en) | 2015-08-20 | 2021-08-10 | Globalwafers Co., Ltd. | Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber |
| EP4538429A1 (en) * | 2015-08-20 | 2025-04-16 | GlobalWafers Co., Ltd. | Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber |