JPS637667U - - Google Patents

Info

Publication number
JPS637667U
JPS637667U JP9976286U JP9976286U JPS637667U JP S637667 U JPS637667 U JP S637667U JP 9976286 U JP9976286 U JP 9976286U JP 9976286 U JP9976286 U JP 9976286U JP S637667 U JPS637667 U JP S637667U
Authority
JP
Japan
Prior art keywords
coupler
entrance
exit
fitting
abutting surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9976286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0417507Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986099762U priority Critical patent/JPH0417507Y2/ja
Publication of JPS637667U publication Critical patent/JPS637667U/ja
Application granted granted Critical
Publication of JPH0417507Y2 publication Critical patent/JPH0417507Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Closures For Containers (AREA)
  • Drying Of Semiconductors (AREA)
JP1986099762U 1986-06-28 1986-06-28 Expired JPH0417507Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986099762U JPH0417507Y2 (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986099762U JPH0417507Y2 (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Publications (2)

Publication Number Publication Date
JPS637667U true JPS637667U (enrdf_load_stackoverflow) 1988-01-19
JPH0417507Y2 JPH0417507Y2 (enrdf_load_stackoverflow) 1992-04-20

Family

ID=30968944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986099762U Expired JPH0417507Y2 (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Country Status (1)

Country Link
JP (1) JPH0417507Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014082250A (ja) * 2012-10-15 2014-05-08 Tokyo Electron Ltd ガス導入装置及び誘導結合プラズマ処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1035684A1 (nl) * 2007-07-23 2009-01-27 Asml Netherlands Bv Small Volume Resist Dispenser.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS489885U (enrdf_load_stackoverflow) * 1971-06-16 1973-02-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS489885U (enrdf_load_stackoverflow) * 1971-06-16 1973-02-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014082250A (ja) * 2012-10-15 2014-05-08 Tokyo Electron Ltd ガス導入装置及び誘導結合プラズマ処理装置

Also Published As

Publication number Publication date
JPH0417507Y2 (enrdf_load_stackoverflow) 1992-04-20

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