JPH01136182U - - Google Patents

Info

Publication number
JPH01136182U
JPH01136182U JP3113188U JP3113188U JPH01136182U JP H01136182 U JPH01136182 U JP H01136182U JP 3113188 U JP3113188 U JP 3113188U JP 3113188 U JP3113188 U JP 3113188U JP H01136182 U JPH01136182 U JP H01136182U
Authority
JP
Japan
Prior art keywords
susceptor
vacuum chamber
gas
attached
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3113188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3113188U priority Critical patent/JPH01136182U/ja
Publication of JPH01136182U publication Critical patent/JPH01136182U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP3113188U 1988-03-08 1988-03-08 Pending JPH01136182U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3113188U JPH01136182U (enrdf_load_stackoverflow) 1988-03-08 1988-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3113188U JPH01136182U (enrdf_load_stackoverflow) 1988-03-08 1988-03-08

Publications (1)

Publication Number Publication Date
JPH01136182U true JPH01136182U (enrdf_load_stackoverflow) 1989-09-18

Family

ID=31256757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3113188U Pending JPH01136182U (enrdf_load_stackoverflow) 1988-03-08 1988-03-08

Country Status (1)

Country Link
JP (1) JPH01136182U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6338560A (ja) * 1986-08-05 1988-02-19 Mitsubishi Alum Co Ltd Ｚｎはんだ付け性のすぐれたアルミニウム熱交換器フイン材用ＡｌおよびＡｌ合金薄板

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6338560A (ja) * 1986-08-05 1988-02-19 Mitsubishi Alum Co Ltd Ｚｎはんだ付け性のすぐれたアルミニウム熱交換器フイン材用ＡｌおよびＡｌ合金薄板

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