JPH0425871U - - Google Patents

Info

Publication number
JPH0425871U
JPH0425871U JP6597490U JP6597490U JPH0425871U JP H0425871 U JPH0425871 U JP H0425871U JP 6597490 U JP6597490 U JP 6597490U JP 6597490 U JP6597490 U JP 6597490U JP H0425871 U JPH0425871 U JP H0425871U
Authority
JP
Japan
Prior art keywords
reactor
line
exhaust line
vapor phase
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6597490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6597490U priority Critical patent/JPH0425871U/ja
Publication of JPH0425871U publication Critical patent/JPH0425871U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6597490U 1990-06-25 1990-06-25 Pending JPH0425871U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6597490U JPH0425871U (enrdf_load_stackoverflow) 1990-06-25 1990-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6597490U JPH0425871U (enrdf_load_stackoverflow) 1990-06-25 1990-06-25

Publications (1)

Publication Number Publication Date
JPH0425871U true JPH0425871U (enrdf_load_stackoverflow) 1992-03-02

Family

ID=31598290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6597490U Pending JPH0425871U (enrdf_load_stackoverflow) 1990-06-25 1990-06-25

Country Status (1)

Country Link
JP (1) JPH0425871U (enrdf_load_stackoverflow)

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