JPS62182977U - - Google Patents

Info

Publication number
JPS62182977U
JPS62182977U JP6959686U JP6959686U JPS62182977U JP S62182977 U JPS62182977 U JP S62182977U JP 6959686 U JP6959686 U JP 6959686U JP 6959686 U JP6959686 U JP 6959686U JP S62182977 U JPS62182977 U JP S62182977U
Authority
JP
Japan
Prior art keywords
vapor phase
base
airtight chamber
sealing
vertical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6959686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6959686U priority Critical patent/JPS62182977U/ja
Publication of JPS62182977U publication Critical patent/JPS62182977U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6959686U 1986-05-09 1986-05-09 Pending JPS62182977U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6959686U JPS62182977U (enrdf_load_stackoverflow) 1986-05-09 1986-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6959686U JPS62182977U (enrdf_load_stackoverflow) 1986-05-09 1986-05-09

Publications (1)

Publication Number Publication Date
JPS62182977U true JPS62182977U (enrdf_load_stackoverflow) 1987-11-20

Family

ID=30910472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6959686U Pending JPS62182977U (enrdf_load_stackoverflow) 1986-05-09 1986-05-09

Country Status (1)

Country Link
JP (1) JPS62182977U (enrdf_load_stackoverflow)

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