JPS62151730U - - Google Patents

Info

Publication number
JPS62151730U
JPS62151730U JP3921186U JP3921186U JPS62151730U JP S62151730 U JPS62151730 U JP S62151730U JP 3921186 U JP3921186 U JP 3921186U JP 3921186 U JP3921186 U JP 3921186U JP S62151730 U JPS62151730 U JP S62151730U
Authority
JP
Japan
Prior art keywords
source
vapor phase
reaction tube
phase growth
gaas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3921186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3921186U priority Critical patent/JPS62151730U/ja
Publication of JPS62151730U publication Critical patent/JPS62151730U/ja
Pending legal-status Critical Current

Links

JP3921186U 1986-03-18 1986-03-18 Pending JPS62151730U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3921186U JPS62151730U (enrdf_load_stackoverflow) 1986-03-18 1986-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3921186U JPS62151730U (enrdf_load_stackoverflow) 1986-03-18 1986-03-18

Publications (1)

Publication Number Publication Date
JPS62151730U true JPS62151730U (enrdf_load_stackoverflow) 1987-09-26

Family

ID=30852174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3921186U Pending JPS62151730U (enrdf_load_stackoverflow) 1986-03-18 1986-03-18

Country Status (1)

Country Link
JP (1) JPS62151730U (enrdf_load_stackoverflow)

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