JPS6365215U - - Google Patents

Info

Publication number
JPS6365215U
JPS6365215U JP15918386U JP15918386U JPS6365215U JP S6365215 U JPS6365215 U JP S6365215U JP 15918386 U JP15918386 U JP 15918386U JP 15918386 U JP15918386 U JP 15918386U JP S6365215 U JPS6365215 U JP S6365215U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth apparatus
ascl
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15918386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15918386U priority Critical patent/JPS6365215U/ja
Publication of JPS6365215U publication Critical patent/JPS6365215U/ja
Pending legal-status Critical Current

Links

JP15918386U 1986-10-17 1986-10-17 Pending JPS6365215U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15918386U JPS6365215U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15918386U JPS6365215U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365215U true JPS6365215U (enrdf_load_stackoverflow) 1988-04-30

Family

ID=31083375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15918386U Pending JPS6365215U (enrdf_load_stackoverflow) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365215U (enrdf_load_stackoverflow)

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