JPH01123069A - 薄膜蒸着装置 - Google Patents
薄膜蒸着装置Info
- Publication number
- JPH01123069A JPH01123069A JP27888087A JP27888087A JPH01123069A JP H01123069 A JPH01123069 A JP H01123069A JP 27888087 A JP27888087 A JP 27888087A JP 27888087 A JP27888087 A JP 27888087A JP H01123069 A JPH01123069 A JP H01123069A
- Authority
- JP
- Japan
- Prior art keywords
- gear
- vapor deposition
- jig table
- workpiece
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 title abstract description 18
- 239000010409 thin film Substances 0.000 title description 3
- 230000008020 evaporation Effects 0.000 claims description 14
- 238000001704 evaporation Methods 0.000 claims description 14
- 238000000427 thin-film deposition Methods 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27888087A JPH01123069A (ja) | 1987-11-04 | 1987-11-04 | 薄膜蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27888087A JPH01123069A (ja) | 1987-11-04 | 1987-11-04 | 薄膜蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01123069A true JPH01123069A (ja) | 1989-05-16 |
| JPH0465903B2 JPH0465903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-10-21 |
Family
ID=17603400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27888087A Granted JPH01123069A (ja) | 1987-11-04 | 1987-11-04 | 薄膜蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01123069A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0741945A (ja) * | 1993-07-30 | 1995-02-10 | Nippon Piston Ring Co Ltd | 回転式コンプレッサ用ベーンの物理蒸着膜形成方法および装置 |
| JP2018024948A (ja) * | 2017-11-15 | 2018-02-15 | 有限会社ファームファクトリー | 真空蒸着装置 |
-
1987
- 1987-11-04 JP JP27888087A patent/JPH01123069A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0741945A (ja) * | 1993-07-30 | 1995-02-10 | Nippon Piston Ring Co Ltd | 回転式コンプレッサ用ベーンの物理蒸着膜形成方法および装置 |
| JP2018024948A (ja) * | 2017-11-15 | 2018-02-15 | 有限会社ファームファクトリー | 真空蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0465903B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-10-21 |
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