JPH01122143A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH01122143A
JPH01122143A JP27990987A JP27990987A JPH01122143A JP H01122143 A JPH01122143 A JP H01122143A JP 27990987 A JP27990987 A JP 27990987A JP 27990987 A JP27990987 A JP 27990987A JP H01122143 A JPH01122143 A JP H01122143A
Authority
JP
Japan
Prior art keywords
die pad
sealing resin
semiconductor device
support piece
support pieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27990987A
Other languages
Japanese (ja)
Inventor
Ryuichiro Mori
隆一郎 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP27990987A priority Critical patent/JPH01122143A/en
Publication of JPH01122143A publication Critical patent/JPH01122143A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To fix a sealing resin to a die pad by forming a through-hole to a support piece shaped by bending one part of the die pad to the rear side of the die pad. CONSTITUTION:Support pieces 12 are shaped by bending one parts of a die pad 11 on the side reverse to the side, on which a semiconductor element 2 is fastened, in the die pad 11, and through-holes 13 penetrating through the support pieces 12 are further bored. Consequently, a sealing resin 5 covering the support pieces 2 and is filled into the through-holes 13 in the support pieces 12 is cured antegrally in a device using the die pad 11. Accordingly, the sealing resin can be fixed firmly to the die pad, thus preventing the peeling and cracking of the sealing resin.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は樹脂封止形半導体装置に関し、特に半導体素子
が搭載されるダイパットの形状に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a resin-sealed semiconductor device, and particularly to the shape of a die pad on which a semiconductor element is mounted.

〔従来の技術〕[Conventional technology]

従来のこの種半導体装置は第3図に示すように構成され
ている。第3図は樹脂封止形半導体装置の側断面図で、
同図において、1はダイパット、2はこのダイパット1
上に固定された半導体素子、3は外部装置(図示せず)
に接続されるリードビンで、このリードビン3はワイヤ
4によって前記半導体素子2に接続されている。なお、
5は前記ダイパット1.半導体素子2.リードビン3の
一部およびワイヤ4を封止するための封止樹脂である。
A conventional semiconductor device of this type is constructed as shown in FIG. FIG. 3 is a side sectional view of a resin-sealed semiconductor device.
In the same figure, 1 is a die pad, 2 is this die pad 1
Semiconductor element fixed on top, 3 is external device (not shown)
This lead bin 3 is connected to the semiconductor element 2 by a wire 4. In addition,
5 is the die pad 1. Semiconductor element 2. This is a sealing resin for sealing a part of the lead bin 3 and the wire 4.

このように構成された従来の半導体装置を基板(図示せ
ず)に実装するには、基板の所定のランド上またはリー
ドビン3の先端部、あるいはその両方に予め半田を供給
しておき、半導体装置を基板の所定位置に固定した後、
赤外線等で全体を加熱することによって半田を溶融させ
、半導体装置のリードビン3と基板とを接合させること
Kよシ行なわれていた。
In order to mount a conventional semiconductor device configured in this manner on a board (not shown), solder is supplied in advance to a predetermined land on the board, to the tip of the lead bin 3, or to both, and then the semiconductor device is mounted. After fixing it in place on the board,
Traditionally, the lead bin 3 of the semiconductor device and the substrate were bonded together by heating the entire body with infrared rays or the like to melt the solder.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかるに、このように構成された半導体装置においては
、基板等に実装する際に全体が加熱されると、ダイバン
ト1の裏面が平坦であるためダイパット1の裏面と封止
樹脂5とは強固に密着されていないから、ダイパット1
と封止樹脂5との線膨張係数の違いKよシ第4図に示す
ように、封止樹脂5はダイパット1の裏面との密着部分
がダイパット1から剥離して膨張し、ダイパット1の側
縁部と対応する部分に応力が集中し割れてしまうという
問題があった。
However, in a semiconductor device configured as described above, when the entire semiconductor device is heated when being mounted on a substrate etc., the back surface of the die pad 1 and the sealing resin 5 are firmly attached because the back surface of the die pad 1 is flat. Since it has not been done, die pad 1
As shown in FIG. 4, the part of the sealing resin 5 that is in close contact with the back surface of the die pad 1 peels off from the die pad 1 and expands, causing the side of the die pad 1 to expand. There was a problem in that stress was concentrated in the parts corresponding to the edges, resulting in cracks.

〔問題点を解決するための手段〕[Means for solving problems]

本発明に係る半導体装置は、ダイパットの一部分をダイ
パットの裏側へ折曲することによって支持片を形成し、
この支持片に貫通孔を設けたものである。
In the semiconductor device according to the present invention, a support piece is formed by bending a part of the die pad to the back side of the die pad,
This support piece is provided with a through hole.

〔作用〕[Effect]

ダイパットの支持片を覆い、かつこの支持片の貫通孔内
に満たされた封止樹脂が一体に硬化することになるから
、封止樹脂は保持片によってダイパットに対して固定さ
れる。
Since the sealing resin that covers the support piece of the die pad and fills the through hole of the support piece is cured together, the sealing resin is fixed to the die pad by the holding piece.

〔実施例〕〔Example〕

以下、その構成等を図に示す実施例によシ詳細に説明す
る。第1図は本発明に係る半導体装置を示す側断面図、
第2図は本発明に使用するダイパットを示す斜視図であ
る。これらの図において前記従来例で説明したものと同
一もしくは同等部材については同一符号を付し、ここに
おいて詳細な説明は省略する。これらの図において、符
号11はダイパットで、このダイパット11には、半導
体素子2が固着する側と反対側にダイパット11の一部
分を折曲するととKよって支持片12が設けられておシ
、さらに、この支持片12を貫通する貫通孔13が穿設
されている。すなわち、このダイパット11を形成する
には、先ずダイパット11から平面視路コ字形のスリン
) l1mを打抜き加工によシ打抜くことによって支持
片12を形成する。なお、このスリン) 11m打抜き
加工の際に貫通孔13も打抜いておく。そして、前記支
持片12をダイパット11に対して折曲させることによ
って、このダイパット11が形成されることになる。
Hereinafter, the configuration and the like will be explained in detail with reference to the embodiment shown in the drawings. FIG. 1 is a side sectional view showing a semiconductor device according to the present invention;
FIG. 2 is a perspective view showing a die pad used in the present invention. In these figures, the same or equivalent members as those explained in the conventional example are given the same reference numerals, and detailed explanation will be omitted here. In these figures, reference numeral 11 denotes a die pad, and when a part of the die pad 11 is bent on the side opposite to the side to which the semiconductor element 2 is fixed, a supporting piece 12 is provided. A through hole 13 is bored through this support piece 12 . That is, in order to form this die pad 11, first, the supporting piece 12 is formed by punching out the support piece 11m which has a U-shape in plan view from the die pad 11. Note that the through hole 13 is also punched out during this 11 m punching process. The die pad 11 is formed by bending the support piece 12 relative to the die pad 11.

したがって、このダイパット11を使用した樹脂封止形
半導体装置においては、支持片12を覆い、かつこの支
持片12の貫通孔13内に満たされた封止樹脂5が一体
に硬化するととKなるから、封止樹脂5は保持片12に
よってダイパット11に対して強固に固定されることに
なる。
Therefore, in the resin-sealed semiconductor device using this die pad 11, when the sealing resin 5 that covers the support piece 12 and fills the through hole 13 of this support piece 12 is cured as a whole, K is obtained. The sealing resin 5 is firmly fixed to the die pad 11 by the holding piece 12.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、ダイパットの一部
分をダイパットの裏側へ折曲することKよって支持片を
形成し、この支持片に貫通孔を設けたため、前記支持片
を覆い、かっこの支持片の貫通孔内に満たされた封止樹
脂が一体に硬化することになるから、封止樹脂は保持片
によってダイパットに対して強固に固定されることにな
る。したがって、半導体装置を基板等に実装する際に、
全体が加熱され封止樹脂が膨張しても、ダイパットの裏
面から封止樹脂が剥離せず、割れを防ぐことができるの
で、信頼性の高い半導体装置を得ることができる。
As explained above, according to the present invention, a support piece is formed by bending a part of the die pad to the back side of the die pad, and a through hole is provided in this support piece, so that the support piece is covered and the bracket is supported. Since the sealing resin filled in the through hole of the piece is cured integrally, the sealing resin is firmly fixed to the die pad by the holding piece. Therefore, when mounting a semiconductor device on a board etc.
Even if the entire die pad is heated and the sealing resin expands, the sealing resin does not peel off from the back surface of the die pad, and cracking can be prevented, so a highly reliable semiconductor device can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る半導体装置を示す側断面図、第2
図は本発明に使用するダイパットを示す斜視図、第3図
は従来の樹脂封止形半導体装置を示す側断面図、第4図
は封止樹脂が膨張した状態を示す側断面図である。 2・・・・半導体素子、5・・・・封止樹脂、11・・
・・ダイパット、12・・・・支持片、13・・・Φ貫
通孔。
FIG. 1 is a side sectional view showing a semiconductor device according to the present invention, and FIG.
FIG. 3 is a perspective view showing a die pad used in the present invention, FIG. 3 is a side sectional view showing a conventional resin-sealed semiconductor device, and FIG. 4 is a side sectional view showing a state where the sealing resin is expanded. 2... Semiconductor element, 5... Sealing resin, 11...
...Die pad, 12...Support piece, 13...Φ through hole.

Claims (1)

【特許請求の範囲】[Claims]  ダイパット上に搭載された半導体素子が樹脂封止され
てなる半導体装置において、前記ダイパットの一部分を
ダイパットの裏側へ折曲することによつて支持片を形成
し、この支持片に貫通孔を設けたことを特徴とする半導
体装置。
In a semiconductor device in which a semiconductor element mounted on a die pad is sealed with resin, a support piece is formed by bending a part of the die pad to the back side of the die pad, and a through hole is provided in the support piece. A semiconductor device characterized by:
JP27990987A 1987-11-05 1987-11-05 Semiconductor device Pending JPH01122143A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27990987A JPH01122143A (en) 1987-11-05 1987-11-05 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27990987A JPH01122143A (en) 1987-11-05 1987-11-05 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH01122143A true JPH01122143A (en) 1989-05-15

Family

ID=17617606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27990987A Pending JPH01122143A (en) 1987-11-05 1987-11-05 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH01122143A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6812554B2 (en) 1999-02-17 2004-11-02 Renesas Technology Corp. Semiconductor device and a method of manufacturing the same
US9076776B1 (en) * 2009-11-19 2015-07-07 Altera Corporation Integrated circuit package with stand-off legs

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6812554B2 (en) 1999-02-17 2004-11-02 Renesas Technology Corp. Semiconductor device and a method of manufacturing the same
US7160760B2 (en) 1999-02-17 2007-01-09 Renesas Technology Corp. Semiconductor device and a method of manufacturing the same
US7385279B2 (en) 1999-02-17 2008-06-10 Renesas Technology Corp. Semiconductor device and a method of manufacturing the same
US7812464B2 (en) 1999-02-17 2010-10-12 Renesas Electronics Corporation Semiconductor device and a method of manufacturing for high output MOSFET
US9076776B1 (en) * 2009-11-19 2015-07-07 Altera Corporation Integrated circuit package with stand-off legs

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