JPH01121863U - - Google Patents
Info
- Publication number
- JPH01121863U JPH01121863U JP19482987U JP19482987U JPH01121863U JP H01121863 U JPH01121863 U JP H01121863U JP 19482987 U JP19482987 U JP 19482987U JP 19482987 U JP19482987 U JP 19482987U JP H01121863 U JPH01121863 U JP H01121863U
- Authority
- JP
- Japan
- Prior art keywords
- weight part
- stopper
- fixed
- distorted
- beam portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001133 acceleration Effects 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19482987U JPH0624773Y2 (ja) | 1987-12-24 | 1987-12-24 | 半導体加速度センサ |
| US07/285,696 US5121633A (en) | 1987-12-18 | 1988-12-16 | Semiconductor accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19482987U JPH0624773Y2 (ja) | 1987-12-24 | 1987-12-24 | 半導体加速度センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01121863U true JPH01121863U (cs) | 1989-08-18 |
| JPH0624773Y2 JPH0624773Y2 (ja) | 1994-06-29 |
Family
ID=31485536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19482987U Expired - Lifetime JPH0624773Y2 (ja) | 1987-12-18 | 1987-12-24 | 半導体加速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624773Y2 (cs) |
-
1987
- 1987-12-24 JP JP19482987U patent/JPH0624773Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0624773Y2 (ja) | 1994-06-29 |
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