JPH01115151U - - Google Patents

Info

Publication number
JPH01115151U
JPH01115151U JP965388U JP965388U JPH01115151U JP H01115151 U JPH01115151 U JP H01115151U JP 965388 U JP965388 U JP 965388U JP 965388 U JP965388 U JP 965388U JP H01115151 U JPH01115151 U JP H01115151U
Authority
JP
Japan
Prior art keywords
sample
objective lens
vacuum
diaphragm
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP965388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP965388U priority Critical patent/JPH01115151U/ja
Publication of JPH01115151U publication Critical patent/JPH01115151U/ja
Pending legal-status Critical Current

Links

JP965388U 1988-01-29 1988-01-29 Pending JPH01115151U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP965388U JPH01115151U (enrdf_load_stackoverflow) 1988-01-29 1988-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP965388U JPH01115151U (enrdf_load_stackoverflow) 1988-01-29 1988-01-29

Publications (1)

Publication Number Publication Date
JPH01115151U true JPH01115151U (enrdf_load_stackoverflow) 1989-08-02

Family

ID=31216583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP965388U Pending JPH01115151U (enrdf_load_stackoverflow) 1988-01-29 1988-01-29

Country Status (1)

Country Link
JP (1) JPH01115151U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05325859A (ja) * 1992-05-22 1993-12-10 Hitachi Ltd 電子線照射装置
JP2011138649A (ja) * 2009-12-28 2011-07-14 Hitachi High-Technologies Corp 電子顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05325859A (ja) * 1992-05-22 1993-12-10 Hitachi Ltd 電子線照射装置
JP2011138649A (ja) * 2009-12-28 2011-07-14 Hitachi High-Technologies Corp 電子顕微鏡

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