JPH01105101A - 光学式変位測定装置 - Google Patents

光学式変位測定装置

Info

Publication number
JPH01105101A
JPH01105101A JP26310187A JP26310187A JPH01105101A JP H01105101 A JPH01105101 A JP H01105101A JP 26310187 A JP26310187 A JP 26310187A JP 26310187 A JP26310187 A JP 26310187A JP H01105101 A JPH01105101 A JP H01105101A
Authority
JP
Japan
Prior art keywords
output
target
calculation means
image
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26310187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575327B2 (cg-RX-API-DMAC7.html
Inventor
Hikari Ando
光 安藤
Yoshiaki Kudo
工藤　良昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP26310187A priority Critical patent/JPH01105101A/ja
Publication of JPH01105101A publication Critical patent/JPH01105101A/ja
Publication of JPH0575327B2 publication Critical patent/JPH0575327B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP26310187A 1987-10-19 1987-10-19 光学式変位測定装置 Granted JPH01105101A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26310187A JPH01105101A (ja) 1987-10-19 1987-10-19 光学式変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26310187A JPH01105101A (ja) 1987-10-19 1987-10-19 光学式変位測定装置

Publications (2)

Publication Number Publication Date
JPH01105101A true JPH01105101A (ja) 1989-04-21
JPH0575327B2 JPH0575327B2 (cg-RX-API-DMAC7.html) 1993-10-20

Family

ID=17384836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26310187A Granted JPH01105101A (ja) 1987-10-19 1987-10-19 光学式変位測定装置

Country Status (1)

Country Link
JP (1) JPH01105101A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0575327B2 (cg-RX-API-DMAC7.html) 1993-10-20

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