JPH01102153U - - Google Patents
Info
- Publication number
- JPH01102153U JPH01102153U JP19912587U JP19912587U JPH01102153U JP H01102153 U JPH01102153 U JP H01102153U JP 19912587 U JP19912587 U JP 19912587U JP 19912587 U JP19912587 U JP 19912587U JP H01102153 U JPH01102153 U JP H01102153U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- plasma cvd
- cvd apparatus
- area
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図〜第３図は本考案の一実施例を示す。第
１図は基板ホルダの正面図、第２図は同縦断面図
であり、第３図はホルダ本体に対する分割桟部の
分解斜視図である。第４図はプラズマＣＶＤ装置
の概要を示す断面略図である。
１……基板ホルダ、２……ホルダ本体、２ａ…
…表面、３……桟部、３ａ，３ｂ，３ｃ……分割
桟部、４……基板、５……チエンバ、６……ＲＦ
電極、７……ＲＦ電源、Ｐ……プラズマ。
1 to 3 show an embodiment of the present invention. FIG. 1 is a front view of the substrate holder, FIG. 2 is a longitudinal cross-sectional view thereof, and FIG. 3 is an exploded perspective view of a dividing bar with respect to the holder main body. FIG. 4 is a schematic cross-sectional view showing the outline of the plasma CVD apparatus. 1... Board holder, 2... Holder body, 2a...
...Surface, 3... Crosspiece, 3a, 3b, 3c... Divided crosspiece, 4... Board, 5... Chamber, 6... RF
Electrode, 7...RF power supply, P...plasma.
Claims (1)
せた小面積の基板とを対向させて、これら複数枚
の基板を同時に成膜するプラズマＣＶＤ装置にお
いて、前記基板ホルダの桟部を絶縁材で形成した
ことを特徴とするプラズマＣＶＤ装置の基板ホル
ダ。 In a plasma CVD apparatus that simultaneously forms films on a plurality of substrates by opposing a large-area RF electrode and a plurality of small-area substrates held in a substrate holder, the crosspiece of the substrate holder is formed of an insulating material. A substrate holder for a plasma CVD apparatus characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19912587U JPH01102153U (en) | 1987-12-28 | 1987-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19912587U JPH01102153U (en) | 1987-12-28 | 1987-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102153U true JPH01102153U (en) | 1989-07-10 |
Family
ID=31489594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19912587U Pending JPH01102153U (en) | 1987-12-28 | 1987-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102153U (en) |
-
1987
- 1987-12-28 JP JP19912587U patent/JPH01102153U/ja active Pending