JPS645431U - - Google Patents
Info
- Publication number
- JPS645431U JPS645431U JP9906287U JP9906287U JPS645431U JP S645431 U JPS645431 U JP S645431U JP 9906287 U JP9906287 U JP 9906287U JP 9906287 U JP9906287 U JP 9906287U JP S645431 U JPS645431 U JP S645431U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- holder
- forming apparatus
- film forming
- cvd film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 5
- 238000002791 soaking Methods 0.000 description 2
Description
第１図は本考案の一実施例を示す縦断面図、第
２図は他の実施例を示す縦断面図、第３図は従来
技術の縦断面図である。
１……基板ホルダ、２……基板、３……均熱板
、４……均熱板押え、５……基板押え。
FIG. 1 is a longitudinal sectional view showing one embodiment of the present invention, FIG. 2 is a longitudinal sectional view showing another embodiment, and FIG. 3 is a longitudinal sectional view of the prior art. 1... Board holder, 2... Board, 3... Soaking plate, 4... Soaking board holder, 5... Board holder.
Claims (1)
に対向してカソード電極が設けられ、前記ホルダ
と電極間でグロー放電が生起されるＣＶＤ成膜装
置において、前記基板ホルダに基板がその外縁部
において電気絶縁性基板押さえを介して取り付け
られたことを特徴とするＣＶＤ成膜装置。 In a CVD film forming apparatus in which a substrate holder is provided in a vacuum chamber, a cathode electrode is provided opposite to the substrate holder, and a glow discharge is generated between the holder and the electrode, the substrate is electrically insulated at the outer edge of the substrate holder. 1. A CVD film forming apparatus, characterized in that it is attached via a flexible substrate holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9906287U JPS645431U (en) | 1987-06-26 | 1987-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9906287U JPS645431U (en) | 1987-06-26 | 1987-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645431U true JPS645431U (en) | 1989-01-12 |
Family
ID=31325875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9906287U Pending JPS645431U (en) | 1987-06-26 | 1987-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645431U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62188308A (en) * | 1986-02-14 | 1987-08-17 | Hitachi Micro Comput Eng Ltd | Supporting electrode |
-
1987
- 1987-06-26 JP JP9906287U patent/JPS645431U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62188308A (en) * | 1986-02-14 | 1987-08-17 | Hitachi Micro Comput Eng Ltd | Supporting electrode |