JPS62147335U - - Google Patents
Info
- Publication number
- JPS62147335U JPS62147335U JP3521886U JP3521886U JPS62147335U JP S62147335 U JPS62147335 U JP S62147335U JP 3521886 U JP3521886 U JP 3521886U JP 3521886 U JP3521886 U JP 3521886U JP S62147335 U JPS62147335 U JP S62147335U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- thin film
- substrate
- back plate
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Description
第１図は本考案の一実施例における上部電極を
示し、ａが上面図、ｂが側断面図、第２図は従来
の上部電極を示し、同様にａが上面図、ｂが側断
面図、第３図は薄膜製造装置の配置を示す断面図
、第４図は第２図の上部電極を用いて成膜された
ａ―Ｓｉ膜の膜厚分布線図、第５図は第１図の上
部電極を用いて成膜されたａ―Ｓｉ膜の膜厚分布
線図である。
１：枠体、２：マスク、３：ガラス基板、４：
背板、９：導電性ばね、１０：押さえ金具。
Fig. 1 shows an upper electrode in an embodiment of the present invention, in which a is a top view and b is a side sectional view, and Fig. 2 is a conventional upper electrode, where a is a top view and b is a side sectional view. , FIG. 3 is a cross-sectional view showing the arrangement of the thin film manufacturing apparatus, FIG. 4 is a film thickness distribution diagram of an a-Si film formed using the upper electrode shown in FIG. 2, and FIG. FIG. 3 is a film thickness distribution diagram of an a-Si film formed using the upper electrode of FIG. 1: frame body, 2: mask, 3: glass substrate, 4:
Back plate, 9: conductive spring, 10: holding metal fitting.
Claims (1)
なる枠体を備え、該枠体に支持される絶縁性基板
の反対向電極側に導電性背板を重ね、下部電極と
枠体とを電源に接続して両電極間にグロー放電を
発生させ、原料ガスを分解して前記基板上に薄膜
を堆積させるものにおいて、背板の反基板側の面
の中央部を加圧する導電性ばねが枠体中央部に固
定されたことを特徴とする薄膜製造装置。 The upper electrode facing the lower electrode is provided with a frame made of a conductive material, a conductive back plate is stacked on the opposite electrode side of the insulating substrate supported by the frame, and the lower electrode and the frame are connected to a power source. In a device that connects to generate a glow discharge between both electrodes to decompose the source gas and deposit a thin film on the substrate, a conductive spring that presses the center of the surface of the back plate on the side opposite to the substrate is attached to the frame. A thin film manufacturing device characterized by being fixed in the center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3521886U JPS62147335U (en) | 1986-03-11 | 1986-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3521886U JPS62147335U (en) | 1986-03-11 | 1986-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62147335U true JPS62147335U (en) | 1987-09-17 |
Family
ID=30844506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3521886U Pending JPS62147335U (en) | 1986-03-11 | 1986-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62147335U (en) |
-
1986
- 1986-03-11 JP JP3521886U patent/JPS62147335U/ja active Pending
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