JPS6237921U - - Google Patents
Info
- Publication number
- JPS6237921U JPS6237921U JP12974985U JP12974985U JPS6237921U JP S6237921 U JPS6237921 U JP S6237921U JP 12974985 U JP12974985 U JP 12974985U JP 12974985 U JP12974985 U JP 12974985U JP S6237921 U JPS6237921 U JP S6237921U
- Authority
- JP
- Japan
- Prior art keywords
- opposing electrodes
- chamber
- impedance
- cvd apparatus
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 238000000354 decomposition reaction Methods 0.000 claims 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例を示す概略正面図
、第２図は電極の斜視図、第３図は従来のプラズ
マＣＶＤ装置の概略正面図である。
１…チヤンバー、２，３…対向電極、９…第３
小電極。
FIG. 1 is a schematic front view showing an embodiment of this invention, FIG. 2 is a perspective view of an electrode, and FIG. 3 is a schematic front view of a conventional plasma CVD apparatus. 1...Chamber, 2, 3...Counter electrode, 9...Third
Small electrode.
Claims (1)
けられた２枚の対向電極に対して、これらの対向
電極間の空間を低インピーダンス化させる第３小
電極を設けたことを特徴とするプラズマＣＶＤ装
置。 A plasma CVD apparatus characterized in that, for two opposing electrodes provided in a chamber for plasma decomposition, a third small electrode is provided to reduce the impedance of the space between these opposing electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12974985U JPS6237921U (en) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12974985U JPS6237921U (en) | 1985-08-26 | 1985-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237921U true JPS6237921U (en) | 1987-03-06 |
Family
ID=31026600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12974985U Pending JPS6237921U (en) | 1985-08-26 | 1985-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237921U (en) |
-
1985
- 1985-08-26 JP JP12974985U patent/JPS6237921U/ja active Pending