JPH01106453U - - Google Patents

Info

Publication number
JPH01106453U
JPH01106453U JP51388U JP51388U JPH01106453U JP H01106453 U JPH01106453 U JP H01106453U JP 51388 U JP51388 U JP 51388U JP 51388 U JP51388 U JP 51388U JP H01106453 U JPH01106453 U JP H01106453U
Authority
JP
Japan
Prior art keywords
comb
shaped electrode
conveying path
wafer transfer
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51388U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP51388U priority Critical patent/JPH01106453U/ja
Publication of JPH01106453U publication Critical patent/JPH01106453U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係るウエハ搬送装置の原理図
、第２図はウエハ搬送装置の搬送装置本体の一部
破断斜視図、第３図はウエハ搬送装置に使用され
る圧電結晶の概略的斜視図である。 １０……搬送装置本体、１１……搬送路、２０
……圧電結晶、２１……表面、２２……裏面、２
２１……櫛形電極、３０……ウエハ、４０……高
周波電源。 Fig. 1 is a principle diagram of a wafer transfer device according to the present invention, Fig. 2 is a partially cutaway perspective view of the main body of the wafer transfer device, and Fig. 3 is a schematic perspective view of a piezoelectric crystal used in the wafer transfer device. It is a diagram. 10... Conveyance device main body, 11... Conveyance path, 20
... Piezoelectric crystal, 21 ... Front surface, 22 ... Back surface, 2
21... comb-shaped electrode, 30... wafer, 40... high frequency power supply.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 搬送路を有する搬送装置本体と、裏面に櫛形電
極を有するとともに、表面を前記搬送路に露出し
た側面視略長円状の圧電結晶と、前記櫛形電極と
接続された高周波電源とを具備したことを特徴と
するウエハ搬送装置。 A conveying device main body having a conveying path, a piezoelectric crystal having a comb-shaped electrode on the back side and having a substantially elliptical shape in side view with the front surface exposed to the conveying path, and a high-frequency power source connected to the comb-shaped electrode. A wafer transfer device featuring:
JP51388U 1988-01-06 1988-01-06 Pending JPH01106453U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51388U JPH01106453U (en) 1988-01-06 1988-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51388U JPH01106453U (en) 1988-01-06 1988-01-06

Publications (1)

Publication Number Publication Date
JPH01106453U true JPH01106453U (en) 1989-07-18

Family

ID=31199607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51388U Pending JPH01106453U (en) 1988-01-06 1988-01-06

Country Status (1)

Country Link
JP (1) JPH01106453U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07231685A (en) * 1994-02-21 1995-08-29 Kanagawa Kagaku Gijutsu Akad Surface acoustic wave linear motor
WO2009031290A1 (en) * 2007-09-03 2009-03-12 National University Corporation Shizuoka University Acoustic wave device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082548A (en) * 1983-10-07 1985-05-10 Canon Inc Sheet transport device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082548A (en) * 1983-10-07 1985-05-10 Canon Inc Sheet transport device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07231685A (en) * 1994-02-21 1995-08-29 Kanagawa Kagaku Gijutsu Akad Surface acoustic wave linear motor
WO2009031290A1 (en) * 2007-09-03 2009-03-12 National University Corporation Shizuoka University Acoustic wave device

Similar Documents

Publication Publication Date Title
JPH01106453U (en)
JPH0375754U (en)
JPH01151621U (en)
JPS6232626U (en)
JPS62118141U (en)
JPS6252928U (en)
JPS6426652U (en)
JPS61149994U (en)
JPS6224513U (en)
JPH0174627U (en)
JPS6268521U (en)
JPH0470176U (en)
JPS61140254U (en)
JPS6455002U (en)
JPS6094242U (en) low frequency treatment device
JPS6431747U (en)
JPH0241351U (en)
JPS6253811U (en)
JPH01161745U (en)
JPH01102153U (en)
JPH02116124U (en)
JPS6327241U (en)
JPS6010652U (en) Shiatsu device
JPS6410378U (en)
JPS6187663U (en)