JPS6252928U - - Google Patents
Info
- Publication number
- JPS6252928U JPS6252928U JP14461685U JP14461685U JPS6252928U JP S6252928 U JPS6252928 U JP S6252928U JP 14461685 U JP14461685 U JP 14461685U JP 14461685 U JP14461685 U JP 14461685U JP S6252928 U JPS6252928 U JP S6252928U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- high frequency
- electrodes
- heating
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
第１図は本考案の実施例を示す断面図、第２図
は清浄結果を示す特性図である。
１……炉、２……ヒータ（加熱手段）、３，４
……電極、５……高周波電源。
FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is a characteristic diagram showing cleaning results. 1... Furnace, 2... Heater (heating means), 3, 4
...Electrode, 5...High frequency power supply.
Claims (1)
内に配された１対の電極、該電極間に高周波を印
加する高周波電源を備えたことを特徴とする結晶
成長用ボート清浄化装置。 A boat cleaning device for crystal growth, comprising a furnace, heating means for heating the inside of the furnace, a pair of electrodes arranged in the furnace, and a high frequency power source that applies high frequency between the electrodes. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14461685U JPS6252928U (en) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14461685U JPS6252928U (en) | 1985-09-20 | 1985-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6252928U true JPS6252928U (en) | 1987-04-02 |
Family
ID=31055383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14461685U Pending JPS6252928U (en) | 1985-09-20 | 1985-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252928U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921598A (en) * | 1982-07-27 | 1984-02-03 | Matsushita Electric Ind Co Ltd | Treatment for purification of carbon member |
-
1985
- 1985-09-20 JP JP14461685U patent/JPS6252928U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921598A (en) * | 1982-07-27 | 1984-02-03 | Matsushita Electric Ind Co Ltd | Treatment for purification of carbon member |