JPS60843U - ion source - Google Patents

ion source

Info

Publication number
JPS60843U
JPS60843U JP9217383U JP9217383U JPS60843U JP S60843 U JPS60843 U JP S60843U JP 9217383 U JP9217383 U JP 9217383U JP 9217383 U JP9217383 U JP 9217383U JP S60843 U JPS60843 U JP S60843U
Authority
JP
Japan
Prior art keywords
ion source
ion
electrode
heating means
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9217383U
Other languages
Japanese (ja)
Inventor
茂 井岡
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP9217383U priority Critical patent/JPS60843U/en
Publication of JPS60843U publication Critical patent/JPS60843U/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はイオン源を示側―各構成図、第２図はイオン源
各電極を示す部分平面図、第３図は従来のイオン源の各
電極を示す部分断面図、第４図は従来のイオン源の各電
極の運転途中又は運転後を示す部分断面図、第５図は本
考案によるイオン源の一実施例を示す各電極の部分断面
図、第６図は本考案の他の実施例を示す各電極の部分断
面図である。 ４ａ・・・正電極、５ａ・・・負電極、６ａ・・・接地
電極、４ｂ、　　５ｂ、　　６ｂ・・・電極のビーム引
き出し口、４ｄ。 ５ｄ、　　５ｄ−・・電極ノサポート、４ｅ、　　５ｅ
、　　６ｅ−加熱器。Figure 1 shows the ion source - each configuration diagram, Figure 2 is a partial plan view showing each electrode of the ion source, Figure 3 is a partial cross-sectional view showing each electrode of a conventional ion source, and Figure 4 is a conventional ion source. FIG. 5 is a partial cross-sectional view of each electrode of the ion source during or after operation, FIG. 5 is a partial cross-sectional view of each electrode showing one embodiment of the ion source according to the present invention, and FIG. 6 is a partial cross-sectional view of each electrode showing an embodiment of the ion source according to the present invention. FIG. 3 is a partial cross-sectional view of each electrode showing an example. 4a... Positive electrode, 5a... Negative electrode, 6a... Ground electrode, 4b, 5b, 6b... Beam extraction port of electrode, 4d. 5d, 5d--electrode support, 4e, 5e
, 6e-heater.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）プラズマ生成部とイオン加速部からなるイオン源
において、イオン引き出し運転時に、イオン加速部の電
極の周辺部又は電極の支持部又はその両者を加熱する加
熱手段を設けたことを特徴とするイオン源。(1) An ion source consisting of a plasma generating section and an ion accelerating section, characterized in that a heating means is provided for heating the peripheral part of the electrode of the ion accelerating section, the supporting section of the electrode, or both during ion extraction operation. ion source. （２）加熱手段は電気ヒータであることを特徴とする実
用新案登録請求の範囲第１項に記載のイオン源。(2) The ion source according to claim 1, wherein the heating means is an electric heater. （３）　　加熱手段は気体又は液体の熱媒体であること
を特徴とする実用新案登録請求の範囲第１項に記載のイ
オン源。(3) The ion source according to claim 1, wherein the heating means is a gas or liquid heat medium.
JP9217383U 1983-06-17 1983-06-17 ion source Pending JPS60843U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9217383U JPS60843U (en) 1983-06-17 1983-06-17 ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9217383U JPS60843U (en) 1983-06-17 1983-06-17 ion source

Publications (1)

Publication Number Publication Date
JPS60843U true JPS60843U (en) 1985-01-07

Family

ID=30222317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9217383U Pending JPS60843U (en) 1983-06-17 1983-06-17 ion source

Country Status (1)

Country Link
JP (1) JPS60843U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375937U (en) * 1986-11-06 1988-05-20
JP2017037787A (en) * 2015-08-10 2017-02-16 日新電機株式会社 Charged particle source and charged particle beam irradiation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375937U (en) * 1986-11-06 1988-05-20
JP2017037787A (en) * 2015-08-10 2017-02-16 日新電機株式会社 Charged particle source and charged particle beam irradiation device

Similar Documents

Publication Publication Date Title
JPS60843U (en) ion source
JPS59107473U (en) Ion beam irradiation device
JPS5940711U (en) electric stove
JPS59194050U (en) Transfer blotting device
JPS5936564U (en) magnetron
JPS6163155U (en)
JPS5988860U (en) plate neon lamp
JPS5932204U (en) electric stove
JPS5838977U (en) Matrix fuel cell
JPS59102029U (en) Moxa for moxibustion
JPS6039557U (en) fluorescent display tube
JPS59139813U (en) microwave heating chamber
JPS6015785U (en) heating element
JPS616109U (en) reflective electric stove
JPS59107243U (en) Thermal head heating resistor
JPS5815197U (en) Transfer plate for heat treatment furnace
JPS60151295U (en) Electrode for low temperature plasma generation
JPS60142598U (en) piezoelectric speaker
JPS60149053U (en) Electron tube blockade heater
JPS6028306U (en) microwave oven
JPS6313599U (en)
JPS59181710U (en) high frequency press
JPS598151U (en) Oxygen concentration detection device
JPS59169057U (en) laser oscillator
JPS59115589U (en) electric stove