JPS63143569U - - Google Patents
Info
- Publication number
- JPS63143569U JPS63143569U JP3546487U JP3546487U JPS63143569U JP S63143569 U JPS63143569 U JP S63143569U JP 3546487 U JP3546487 U JP 3546487U JP 3546487 U JP3546487 U JP 3546487U JP S63143569 U JPS63143569 U JP S63143569U
- Authority
- JP
- Japan
- Prior art keywords
- ion gas
- sputtering
- chamber
- generation section
- gas generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案によるクリーニング装置の一実
施例を示す要部模式図、第２図は従来のスパツタ
リング装置を示す模式図である。
２〜５：スパツタリングチヤンバ、７：トレイ
、８：ターゲツト、９：クリーニングチヤンバ、
１０：イオンガス発生室。
FIG. 1 is a schematic diagram of essential parts of an embodiment of a cleaning device according to the present invention, and FIG. 2 is a schematic diagram of a conventional sputtering device. 2 to 5: sputtering chamber, 7: tray, 8: target, 9: cleaning chamber,
10: Ion gas generation chamber.
Claims (1)
るチヤンバと、 該チヤンバにイオンガスを供給するイオンガス
発生部と、 上記イオンガス発生部で生成したイオンガスを
チヤンバ内に設置された基板表面に衝突させる加
速装置とを備えてなることを特徴とするスパツタ
リング装置。[Scope of Claim for Utility Model Registration] A chamber for forming a thin film on the surface of a substrate by sputtering, an ion gas generation section for supplying ion gas to the chamber, and an ion gas generation section installed in the chamber for supplying the ion gas generated by the ion gas generation section. A sputtering device comprising: an accelerator for causing the sputtering to collide with the surface of the sputtering substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3546487U JPS63143569U (en) | 1987-03-11 | 1987-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3546487U JPS63143569U (en) | 1987-03-11 | 1987-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63143569U true JPS63143569U (en) | 1988-09-21 |
Family
ID=30844983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3546487U Pending JPS63143569U (en) | 1987-03-11 | 1987-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63143569U (en) |
-
1987
- 1987-03-11 JP JP3546487U patent/JPS63143569U/ja active Pending
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